Structure and method of manufacturing the same
View Patent ↗A method of manufacturing a structure in which a substrate can be removed easily from a structure that has been formed on the substrate by using a film forming technology. The method of manufacturing a structure includes the steps of (a) forming an intermediate layer on a substrate; (b) forming a structure including a brittle material layer on the intermediate layer by at least using a spray deposition method of spraying material powder toward the substrate, on which the intermediate layer is formed, to deposit the material powder; and (c) removing the substrate from the structure.
1. A method of manufacturing a structure comprising the steps of:
(a) forming an intermediate layer on a substrate;
(b) forming a structure including a brittle material layer on said intermediate layer by at least using a spray deposition method of spraying material powder toward said substrate, on which said intermediate layer is formed, to deposit the material powder; and
(c) separating said substrate from said structure,
wherein:
step (a) includes forming the intermediate layer having a void ratio higher than that of said brittle material layer by generating an aerosol containing ceramic powder having a first average particle diameter and spraying the aerosol toward said substrate to deposit the ceramic powder; and
step (b) includes forming said brittle material layer by generating an aerosol containing ceramic powder having a second average particle diameter larger than said first average particle diameter and spraying the aerosol toward said substrate to deposit the ceramic powder.
2. The method of manufacturing a structure according to claim 1 , wherein:
said intermediate layer contains first ceramic having a first average crystal particle diameter; and
said brittle material layer contains second ceramic having the same composition as that of said first ceramic and a second average crystal particle diameter smaller than said first average crystal particle diameter.
3. The method of manufacturing a structure according to claim 2 , wherein Vickers hardness of said first ceramic is smaller than Vickers hardness of said second ceramic.
4. The method of manufacturing a structure according to claim 1 , further comprising the step of:
preparing ceramic powder having one of said first average particle diameter and said second average particle diameter by mixing plural kinds of ceramic powder having different center values of particle diameter distributions from each other at a predetermined ratio.
5. The method of manufacturing a structure according to claim 1 , wherein at least one of step (a) and step (b) includes generating plural kinds of aerosol containing ceramic powder having different center values of particle diameter distributions from each other, and mixing the plural kinds of aerosol at a predetermined ratio.
6. The method of manufacturing a structure according to claim 1 , wherein step (c) includes separating said substrate from said structure by immersing said substrate, on which said intermediate layer and said structure are formed, in a chemical solution.
7. The method of manufacturing a structure according to claim 1 , wherein step (c) includes separating said substrate from said structure by heat treating said substrate, on which said intermediate layer and said structure are formed, at higher temperature than temperature at which said intermediate layer is formed.