Method of fabricating a micro-electromechanical fluid ejection device
View Patent ↗A method of fabricating a micro-electromechanical fluid ejection device includes the step of forming a first layer of a sacrificial material on a substrate incorporating a drive circuitry layer. A first electrically conducting layer, a first structural layer and a second electrically conducting layer are formed on the sacrificial material with the first structural layer interposed between the electrically conducting layers. The sacrificial material is formed so that the first electrically conducting layer defines a heating circuit connected to the drive circuitry, and the electrically conducting layers and the first structural layer define a fluid ejecting member connected to an actuator arm that is displaceable on heating and subsequent expansion of the first electrically conducting layer. A second layer of sacrificial material is formed on the second conducting layer layer. A second structural layer is formed on the second layer of sacrificial material. The sacrificial material is formed so that the second structural layer defines a nozzle chamber structure with the fluid ejecting member positioned in the nozzle chamber structure. The sacrificial material is removed so that the nozzle chamber structure defines a nozzle chamber and a fluid ejection port in fluid communication with the nozzle chamber.
1. A method of fabricating a micro-electromechanical fluid ejection device that comprises the steps of:
forming a first layer of a sacrificial material on a substrate incorporating a drive circuitry layer;
forming a first electrically conducting layer, a first structural layer and a second electrically conducting layer on the sacrificial material, with the first structural layer interposed between the electrically conducting layers, the sacrificial material being formed so that the first electrically conducting layer defines a heating circuit connected to the drive circuitry, and the electrically conducting layers and the first structural layer define a fluid ejecting member connected to an actuator arm that is displaceable on heating and subsequent expansion of the first electrically conducting layer;
forming a second layer of sacrificial material on the second electrically conducting layer;
forming a second structural layer on the second layer of sacrificial material, the sacrificial material being formed so that the second structural layer defines a nozzle chamber structure, with the fluid ejecting member positioned in the nozzle chamber structure; and
removing the sacrificial material so that the nozzle chamber structure defines a nozzle chamber and a fluid ejection port in fluid communication with the nozzle chamber.
2. A method as claimed in claim 1 , which includes a step of etching the substrate to form a fluid inlet channel in fluid communication with the nozzle chamber.
3. A method as claimed in claim in claim 1 , in which the step of forming the first electrically conducting layer, the first structural layer and the second electrically conducting layer includes steps of depositing the first electrically conducting layer, the first structural layer and the second electrically conducting layer and etching the electrically conducting layers and the first structural layer in a single operation.
4. A method as claimed in claim 1 , in which the first sacrificial layer is deposited so that, when the first electrically conducting layer is formed, a break is formed between the actuator arm and the fluid ejecting member so that the fluid ejecting member is electrically isolated.
5. A method as claimed in claim 1 , in which the step of forming the second structural layer includes the step of forming a nozzle rim positioned about the fluid ejection port.
6. A method as claimed in claim 1 , in which the second layer of sacrificial material is formed so that the second structural layer defines a post for anchoring the actuator to the substrate.