Method of fabricating a circuit array substrate
View Patent ↗A circuit array substrate includes an optically transparent substrate, pixels having switching elements formed on the transparent substrate, gate electrode lines connected to the switching elements, the gate electrode lines being provided on a first insulation film with separating portions in the pixels, signal lines connected to the switching elements, the signal lines being provided on a second insulation film which is different from the first insulation film, and electrically conductive portions provided on the second film to electrically connect the electrode lines with the separating portions to each other. The separating portions reduce electrostatic capacitances defined between the gate electrode lines and the switching elements when the conductive portions are not connected between the separating portions.
1. A method of fabricating a circuit array substrate, comprising:
forming semiconductor islands on an optically transparent substrate;
forming a first insulation film to cover said semiconductor islands;
forming gate electrode lines on said first insulation film with separating portions;
separating said substrate including said gate electrode lines from a stage including a grounded movable pin wherein said separating portions reduce electrostatic capacitances generated between said gate electrode lines and said semiconductor islands, when separating said substrate from the stage, to prevent said first insulation film from being caused electrostatic destruction;
forming a second insulation film to cover said gate electrode lines;
forming signal lines on said second insulation film different from said first insulation film; and
forming electrically conductive portions on said second insulation film to electrically connect said gate electrode lines with said separating portions to each other.