Cleaning sheet for probe needles
View Patent ↗A cleaning sheet has a disc-shaped substrate. First and second polishing layers are disposed over the substrate. The first polishing layer has a surface formed in a surface-roughened fashion to polish a tip section of each probe needle and has the function of removing adherents leading to inhibition of electrical conduction, which have been adhered to the tip of the needle in a coating or film form. The second polishing layer is a layer in which a large number of polishing grains are mixed into an elastic member and has the function of sticking the tip of the probe needle into the elastic member to remove foreign substances. The height of the surface of the second polishing layer is set so as to become identical to or slightly higher than that of the surface of the first polishing layer.
1. A cleaning sheet for probe needles, comprising:
a substrate detachably fixed onto a stage moved horizontally and vertically relative to holding means for holding a probe card provided with a plurality of probe needles in a protruded form;
a surface-roughened first polishing layer provided over the substrate, said first polishing layer causing tips of the probe needles to be pressed thereagainst from a vertical direction and polishing the tips of the probe needles when the tips slide in a horizontal direction; and
a second polishing layer provided over the substrate adjacent to the first polishing layer as viewed in the direction of motion of the probe card, said second polishing layer having polishing grains mixed into an elastic member having a thickness greater than that of the first polishing layer and causing the tips of the probe needles to be stuck into the elastic member when the tips are pressed from the vertical direction, thereby polishing side faces of the tips of the probe needles by means of the polishing grains.
2. The cleaning sheet according to claim 1 , wherein the first polishing layer and the second polishing layer are divided into two and provided over the substrate.
3. The cleaning sheet according to claim 2 , wherein the first polishing layer and the second polishing layer are divided into two on concentric circles and adhered onto the substrate.
4. The cleaning sheet according to claim 1 , wherein the first polishing layer and the second polishing layer are alternately disposed at predetermined intervals and provided over the substrate.
5. The cleaning sheet according to claim 4 , wherein the first polishing layer and the second polishing layer are alternately disposed on concentric circles at predetermined intervals.