Semiconductor device, LED print head and image-forming apparatus using same, and method of manufacturing semiconductor device
View Patent ↗In a method of manufacturing a semiconductor thin film piece device, a plurality of semiconductor thin film pieces ( 14 ) are selected from among the semiconductor thin film pieces ( 14 ) formed on a first substrate ( 35 ), and bonded to a first set of predetermined area on a second substrate ( 12 ). Subsequently, a plurality of semiconductor thin film pieces are selected from the remaining semiconductor thin film pieces ( 14 ), and bonded to a second set of predetermined area.
1. A semiconductor device comprising:
a semiconductor thin-film piece,
a substrate; and
a bonding layer provided on a surface of the substrate, said bonding layer having a surface which is wider than the semiconductor thin-film piece, and to which the semiconductor thin-film is bonded, wherein
said surface of said bonding layer is substantially flat; and
said surface of said bonding layer is higher than any other part of the substrate.
2. The semiconductor device according to claim 1 , wherein the semiconductor thin-film piece has a light-emitting semiconductor element, the substrate comprises a Si substrate, and includes a chip area in which a drive circuit for driving said light-emitting element is formed, wherein said semiconductor thin-film piece is bonded in the chip area.
3. The semiconductor device according to claim 1 , wherein said bonding layer is a metal layer.
4. The semiconductor device according to claim 1 , wherein said bonding layer is an insulating layer.
5. The semiconductor device according to claim 1 , wherein said bonding layer is a semiconductor layer.
6. The semiconductor device according to claim 1 , wherein said bonding layer is a laminate of a metal layer and an insulation film layer.
7. The semiconductor device according to claim 6 , wherein said bonding layer comprises an interconnection layer.
8. The semiconductor device according to claim 6 , wherein said bonding layer has an uppermost layer which is metal.
9. An LED print head comprising a semiconductor device according to claim 1 .
10. An image-forming apparatus comprising an LED print head according to claim 9 , and a photosensitive drum disposed facing said LED print head.
11. The semiconductor device according to claim 1 , wherein said semiconductor thin-film piece layer comprises a compound semiconductor epitaxial layer or inorganic semiconductor layer.
12. The semiconductor device according to claim 11 , wherein said compound semiconductor epitaxial layer is formed of GaAsP, InP, AlGaInP, InGaAsP, GaN, InGaN, or AlGaN.
13. The semiconductor device according to claim 11 , wherein said inorganic semiconductor layer is formed of monocrystalline silicon layer or polycrystalline silicon layer.
14. The semiconductor device according to claim 1 , wherein said substrate is formed of silicon, glass, ceramic, metal, plastic or quartz.