Head assembly, disk unit, and bonding method and apparatus
View Patent ↗A head assembly is provided with a mounting surface, and an integrated circuit chip which is mounted on the mounting surface and processes signals. The integrated circuit chip is covered by a layer which prevents generation of foreign particles from the integrated circuit chip by the provision of the layer.
1. A bonding apparatus for bonding conductor bumps on a semiconductor chip onto corresponding pads on a substrate by ultrasonic vibration, comprising:
a stage having a receiving surface for receiving a first surface of the substrate opposite to a second surface of the substrate provided with the pads; and
a bonding unit having an end surface for holding a first surface of the semiconductor chip opposite to a second surface of the semiconductor chip provided with the conductor bumps, and a closing member having a closing surface,
said end surface adhering to the first surface of the semiconductor chip by suction via a suction hole which opens at the end surface,
said closing member being movable to close the suction hole at the end surface when generating the ultrasonic vibration, so that the closing surface and the end surface form a single flat surface when the closing member closes the suction hole.
2. The bonding apparatus as claimed in claim 1 , wherein said bonding unit comprises:
a transport mechanism which transports the semiconductor chip to a position above the stage.
3. The bonding apparatus as claimed in claim 2 , wherein said bonding unit further comprises:
a pressing mechanism which presses the semiconductor chip against the substrate which is placed on the stage in a state where the closing member closes the suction hole.
4. The bonding apparatus as claimed in claim 3 , further comprising:
an ultrasonic radiator provided on the pressing mechanism and subjecting the semiconductor chip to ultrasonic vibration when bonding the bumps on the corresponding pads.
5. The bonding apparatus as claimed in claim 3 , wherein said transport mechanism and said pressing mechanism are independent mechanisms.
6. The bonding apparatus as claimed in claim 3 , wherein said transport mechanism and said pressing mechanism are formed by a single mechanism.
7. The bonding apparatus as claimed in claim 3 , further comprising:
an ultrasonic radiator provided on the stage and subjecting the substrate to ultrasonic vibration when bonding the bumps on the corresponding pads.
8. The bonding apparatus as claimed in claim 1 , wherein the end surface has an area greater than an area of the first surface of the semiconductor chip.
9. The bonding apparatus as claimed in claim 3 , further comprising:
a control unit configured to control the bonding unit,
wherein the control unit receives a pressure detection signal from the pressing mechanism when the pressing mechanism detects that a predetermined pressure is applied on the semiconductor chip, and controls the closing member to close the suction hole in response to the pressure detection signal.
10. The bonding apparatus as claimed in claim 9 , further comprising:
an ultrasonic radiator provided on the stage and subjecting the substrate to ultrasonic vibration when bonding the bumps on the corresponding pads.
11. The bonding apparatus as claimed in claim 10 , wherein the control unit controls the ultrasonic radiator to generate the ultrasonic vibration when the closing member closes the suction hole.