IP Library Granted Patent US 7,228,464
Granted Patent B2
US 7,228,464 · App. 10/974,464 · Granted Jun 5, 2007

PICA system timing measurement and calibration

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Quick Facts
Patent No.
US 7,228,464
App. No.
10/974,464
Granted
Jun 5, 2007
Kind
B2
Abstract

PICA probe system apparatus is described, including apparatus for calibrating an event timer having a coarse measurement capability in which time intervals defined by clock boundaries are counted and a fine measurement capability in which time between boundaries is interpolated using a voltage ramp.

Claims (22)

1. A PICA probe system comprising:

a. A PICA collection camera;

b. Acquisition electronics responsive to strobe pulses from the PICA collection camera representing photon-detection events for collecting data about the photon-detection events, said acquisition electronics comprising:

i. an input for receiving trigger pulses from a test loop, said trigger pulses having a defined trigger period;

ii. an oscillator generatng clock pulses having a clock period shorter than the trigger period;

iii. a coarse-measurement counter for counting clock pulses between strobe pulses and trigger pulses; and,

iv. a fine-measurement interpolator measuring a time delay of less than one clock period; and

c. A workstation having a processor in communication with the PICA collection camera and the acquisition electronics for controlling operation and for processing data collected by the acquisition electronics.

2. The system of claim 1 , wherein said fine-measurement interpolator further comprises a voltage ramp and an analog-to-digital converter for sampling the voltage ramp at a plurality of known times relative to the clock pulses to obtain voltage samples from which slope of the voltage ramp can be calculated.

3. The apparatus of claim 2 , further comprising a phase-locked loop to maintain the trigger pulses and the clock pulses in a defined phase relationship.

4. The apparatus of claim 1 , wherein the fine-measurement interpolator measures a time period from a strobe pulse to next clock pulse.

5. The apparatus of claim 1 , wherein the fine-measurement interpolator measures a time period from a trigger pulse to next clock pulse.

6. The apparatus of claim 4 , further comprising a second fine-measurement interpolator measuring a time period from a trigger pulse to next clock pulse.

7. The apparatus of claim 5 , further comprising a second fine-measurement interpolator measuring a time period from a strobe pulse to next clock pulse.

8. An electronic timer system for timing light emissions from devices in integrated circuits, comprising:

a trigger input for receiving trigger pulses from a looping vector applied to the integrated circuit, said trigger pulses having a defined trigger period;

a strobe input for receiving strobe pulses corresponding to the light emission from the integrated circuit;

an oscillator generating clock pulses having a clock period shorter tan the trigger period;

a coarse-measurement counter counting clock pulses between strobe pulses and trigger pulses and outputting clock count;

a fine-measurement interpolator measuring a first time period from a trigger pulse to next clock pulse and a second time period from a strobe pulse to next clock pulse; and, an arithmetic unit receiving the clock count, the first time period and the second time period and generating a timing signal thereform.

9. The timer system of claim 8 , wherein the fine-measurement interpolator comprises a first time to voltage converter generating voltage corresponding to the first time period and a second time to voltage converter generating voltage corresponding to the second time period.

10. The timer system of claim 8 , further comprising a phase lock loop coupling the trigger pulses and the clock pulses.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 4, 2009
From: CREDENCE SYSTEMS CORPORATION
To: DCG SYSTEMS, INC.
Reel/Frame 022773/0805 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 6, 2007
From: WILSHER, KENNETH R.
To: SCHLUMBERGER TECHNOLOGIES, INC.
Reel/Frame 019128/0573 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 6, 2007
From: SCHLUMBERGER TECHNOLOGIES, INC.
To: NPTEST, LLC
Reel/Frame 019128/0593 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 2, 2005
From: NPTEST, LLC
To: CREDENCE SYSTEMS CORPORATION
Reel/Frame 016296/0955 →