Inductively generated streaming plasma ion source
View Patent ↗A novel pulsed, neutralized ion beam source is provided. The source uses pulsed inductive breakdown of neutral gas, and magnetic acceleration and control of the resulting plasma, to form a beam. The beam supplies ions for applications requiring excellent control of ion species, low remittance, high current density, and spatial uniformity.
1. A streaming plasma ion source, comprising:
a power supply;
a gas supply positioned upstream of the source;
a set of coils receiving power from the power supply for conveying an energy for ionization of a gas and acceleration of a resultant plasma, and being insulated from the plasma; and
a pre-ionization coil, being a wire coil with a gap in series with a high impedance circuit element for receiving the energy for ionization.
2. The source of claim 1 further comprising a modulator for shaping of the resultant neutralized ion beam pulse, the modulator including a set of coils having electric current flowing therein.
3. The source of claim 1 further comprising a nozzle disposed at the proximity of the set of coils to create a reservoir for the gas subject to ionization.
4. The source of claim 1 further compromising a tank circuit comprising a capacitance positioned in parallel with the inductance of the set of coils for receiving a supply of energy and outputting the same for ionization and acceleration.
5. The source of claim 1 wherein the gas supply comprises a fast needle valve, using a current through a coil generating a pulsed magnetic field that does not fully penetrate a metallic plate connected to a stem thereby controlling the valve.
6. A streaming plasma ion source, comprising:
a power supply;
a gas supply position upstream of the source;
a set of coils receiving power from the power supply for conveying an energy for ionization of a gas and acceleration of the resultant plasma, and being insulated from the plasma; and
a modulator for shaping of the resultant neutralized ion beam pulse, the modulator including a set of coils having electric current flowing therein.
7. The source of claim 6 further comprising a pre-ionization coil, being a wire coil with a gap positioned in series with a high impedance circuit element for receiving the energy for ionization.
8. The source of claim 6 further comprising a nozzle disposed at the proximity of the set of coils to create a reservoir for the gas subject to ionization.
9. The source of claim 6 further comprising a tank circuit comprising a capacitance positioned in parallel with the inductance of the set of coils for receiving a supply of energy and outputting the same for ionization and acceleration.
10. The source of claim 6 wherein the gas supply comprises a fast needle valve, which uses a current through a coil generating a pulsed magnetic field being free from fully penetrating a metallic plate connected to the needle, thereby controlling the valve.
11. A streaming plasma ion source, comprising:
a power supply;
a gas supply position upstream of the source wherein the gas supply comprises a fast needle valve, which uses a current through a coil generating a pulsed magnetic field being free from fully penetrating a metallic plate connected to a stem thereby controlling the valve; and
a set of coils receiving power from the power supply for conveying an energy for ionization of a gas and accelerating a resultant plasma, and being insulated from the plasma.
12. The source of claim 11 further comprising a modulator for shaping of the resultant neutralized ion beam pulse, the modulator including a set of coils having electric current flowing therein.
13. The source of claim 11 further comprising a nozzle disposed at the proximity of the set of coils to create a reservoir for a gas subject to ionization.
14. The source of claim 11 further comprising a tank circuit comprising a capacitance positioned in parallel with an inductance of the set of coils for receiving a supply of energy and outputting the same for ionization and acceleration.
15. The source of claim 11 further comprising a pre-ionization coil, a wire coil with a gap positioned in series with a high impedance circuit element for receiving an energy for ionization.
16. A streaming plasma ion source, comprising:
a power supply;
a gas supply being positioned upstream of the source, wherein the gas supply comprises a fast needle valve, which uses a current through a coil generating a pulsed magnetic field that is free from fully penetrating a metallic plate connected to a stem thereby controlling the valve;
a set of coils receiving power from the power supply for conveying an energy for ionization of a gas and acceleration of the resultant plasma, and being insulated from the plasma;
a modulator for shaping of the resultant neutralized ion beam pulse, the modulator including a set of coils having electric current flowing therein;
a nozzle disposed at the proximity of the set of coils to create a reservoir for a gas subject to ionization;
a tank circuit comprising a capacitance in parallel with the inductance of the set of coils for receiving a supply of energy and outputting the same for ionization and acceleration; and
a pre-ionization coil being a wire coil with a gap positioned in series with a high impedance circuit element for receiving the energy for ionization.