Semiconductor device manufacturing method and manufacturing apparatus
View Patent ↗A method for manufacturing a semiconductor device is provided including: providing a reinforcing member on one surface of a wiring substrate that has a first region where a semiconductor chip is mounted and a second region around the first region, and has terminals extending from the first region to the second region formed on another surface thereof in a manner that the reinforcing member overlaps the terminals and a part thereof protrudes from the first region to the second region; cutting the terminals along a boundary between the first region and the second region; and continuously cutting the reinforcing member from an inboard side thereof to an outboard side along the boundary between the first region and the second region.
1. A method for manufacturing a semiconductor device, comprising the steps of:
(a) providing a reinforcing member on one surface of a wiring substrate that has a first region where a semiconductor chip is mounted and a second region around the first region, and has terminals extending from the first region to the second region formed on another surface thereof, the reinforcing member overlapping the terminals and a part of the reinforcing member protrudes from the first region to the second region;
(b) cutting the terminals along a boundary between the first region and the second region; and
(c) continuously cutting the reinforcing member from an inboard side to an outboard side along the boundary between the first region and the second region.
2. The method for manufacturing a semiconductor device according to claim 1 , wherein:
step (b) is conducted by punching through from a surface side having the terminals in the wiring substrate; and
step (c) is conducted by punching through from the surface side having the terminal in the wiring substrate.
3. The method for manufacturing a semiconductor device according to claim 2 , wherein:
step (c) is conducted after conducting step (b).
4. The method for manufacturing a semiconductor device according to claim 2 , wherein:
in step (b), the terminals are cut by punching through the second region while the first region is pressed to be fixed.
5. The method for manufacturing a semiconductor device according to claim 2 , wherein:
in step (b), the terminals are cut by forming a slit along the boundary between the first region and the second region.
6. The method for manufacturing a semiconductor device according to claim 5 , wherein:
the slit includes a first portion extending inside the reinforcing member in a widthwise direction of the terminals, and a second portion extending inside the reinforcing member in a lengthwise direction of the terminals.
7. The method for manufacturing a semiconductor device according to claim 6 , wherein:
the slit further includes a third portion disposed outside the reinforcing member opposite the second portion.
8. The method for manufacturing a semiconductor device according to claim 2 , wherein:
in step (c), the reinforcing member is continuously cut from the inboard side to the outboard side by punching through the first region while the second region is pressed to be fixed.
9. The method for manufacturing a semiconductor device according to claim 7 , wherein:
in step (c), the cutting is conducted without tearing a portion between the second portion and the third portion.
10. The method for manufacturing a semiconductor device according to claim 1 , wherein:
by steps (b) and (c), the cutting is conducted along an entirety of the boundary between the first region and the second region.
11. The method for manufacturing a semiconductor device according to claim 1 , wherein:
by steps (b) and (c), the cutting is conducted only along a part of the boundary between the first region and the second region.
12. The method for manufacturing a semiconductor device according to claim 1 , wherein:
the wiring substrate has a plurality of the first regions;
the wiring substrate is spanned across a pair of first and second reels; and at least one of steps (b) and (c) is conducted while the wiring substrate is fed out from the first reel and wound by the second reel.
13. The method for manufacturing a semiconductor device according to claim 12 , wherein:
the wiring substrate is transferred in a direction in which cut faces of the terminals in step (b) are disposed on a downstream side.
14. The method for manufacturing a semiconductor device according to claim 1 , wherein:
in step (a), the reinforcing member is adhered to the wiring substrate through adhesive material.
15. The method for manufacturing a semiconductor device according to claim 14 , wherein:
the adhesive material is an energy setting adhesive material; and further comprising:
before steps (b) and (c), applying energy to harden the adhesive material.