Method and apparatus for forming polycrystalline layer using laser crystallization
View Patent ↗A method and an apparatus for forming a polycrystalline layer using laser annealing for preventing damage to the peripheral region of the substrate during laser annealing. The laser annealing comprises a shadow mask structure. When crystallizing an amorphous layer by laser annealing, the shadow mask structure shields the peripheral region of the amorphous layer from laser irradiation. A method for forming a polycrystalline layer using the laser annealing apparatus is also provided in the invention.
1. A processing chamber for laser annealing a silicon layer over a substrate, the silicon layer having a thinner thickness in a periphery region than in a main region, comprising:
a stage for supporting the substrate; and
a shadow mask structure positioned in relation to the stage, shielding the periphery region of the silicon layer from a laser beam when the silicon layer is subject to the laser beam during a laser annealing process, wherein the shadow mask structure comprises:
a baffle plate; and
a support structure fixed to the stage for supporting the baffle plate, wherein the support structure comprises a support frame fixed to the stage supporting the baffle plate in a manner that allows the baffle plate to be movable relative to the support frame to selectively shield the periphery region of the silicon layer.
2. The process chamber as claimed in claim 1 , wherein the silicon layer is an amorphous silicon layer.
3. The process chamber as claimed in claim 2 , wherein after laser annealing process, the amorphous silicon layer is transformed into a polycrystalline silicon layer.
4. A processing chamber for laser annealing a silicon layer over a substrate, the silicon layer having a thinner thickness in a periphery region than in a main region, comprising:
a stage for supporting the substrate; and
a shadow mask structure positioned in relation to the stage, shielding the periphery region of the silicon layer from a laser beam when the silicon layer is subject to the laser beam during a laser annealing process, wherein the shadow mask structure comprises:
a baffle plate; and
a support structure fixed to the stage for supporting the baffle plate, wherein the shadow mask structure further comprises a rotatable element for fixing the baffle plate to the support structure in a rotatable condition.
5. A laser annealing apparatus, comprising:
a processing chamber for laser annealing a silicon layer over a substrate, the silicon layer having a thinner thickness in a periphery region than in a main region, said processing chamber comprising:
a stage for supporting the substrate; and
a shadow mask structure positioned in relation to the stage, shielding the periphery region of the silicon layer from a laser beam that is directed at the silicon layer supported in the processing chamber during a laser annealing process, wherein the shadow mask structure comprises a baffle plate and a support structure movably supporting the baffle plate in relation to the support structure to selectively shield the periphery region of the substrate, wherein the support structure comprises a variable structure positioning the baffle plate variably in relation to the variable structure to selectively shield the periphery region of the silicon layer; and
a controller controlling relative movements of the stage and the laser beam to expose various sections of the silicon layer to the laser beam to effect laser annealing.
6. The laser annealing apparatus as claimed in claim 5 , wherein the silicon layer is an amorphous silicon layer.
7. The laser annealing apparatus as claimed in claim 6 , wherein after laser annealing process, the amorphous silicon layer is transformed into a polycrystalline silicon layer.
8. The process chamber as claimed in claim 5 , wherein the variable structure comprises a structure comprises a resilient structure.
9. The process chamber as claimed in claim 5 , wherein the variable structure is supported by a wall of the processing chamber.
10. The process chamber as claimed in claim 5 , wherein the variable structure comprises a micro actuator or a screw drive indexing mechanism.
11. A processing chamber for laser annealing a silicon layer over a substrate, the silicon layer having a thinner thickness in a periphery region than in a main region, comprising:
a stage for supporting the substrate; and
a shadow mask structure positioned in relation to the stage, shielding the periphery region of the silicon layer from a laser beam when the silicon layer is subject to the laser beam during a laser annealing process, wherein the shadow mask structure comprises:
a baffle plate; and
a support structure supporting the baffle plate in relation to the stage, wherein the support structure comprises a support frame movably supporting the baffle plate relative to the support frame to selectively shield the periphery region of the silicon layer, wherein the support frame comprises a variable structure positioning the baffle plate variably in relation to the variable structure to selectively shield the periphery region of the silicon layer.
12. The process chamber as claimed in claim 11 , wherein the support structure is supported by a wall of the processing chamber.