Semiconductor device
The present invention miniaturizes a HEMT element used as a switching element in a radio frequency module. A single gate electrode 17 is formed in an active region defined by an element separation portion 9 on a main surface of a substrate 1 comprising GaAs. The gate electrode 17 is patterned so as to extend in the vertical direction of the page surface between source electrodes 13 and drain electrodes 14 , and to extend in left and right directions at other portions. Thus, the ratio of the gate electrode 17 disposed outside the active region is reduced, and the area of a gate pad 17 A is reduced.
1. A semiconductor device including a first channel type high electron mobility transistor (HEMT), the HEMT including:
a channel layer formed in an active region surrounded by an element separation region on a main surface of a substrate;
an electron supplying layer formed on the channel layer;
a gate electrode Schottky-connected to the electron supplying layer; and
a first source electrode and a first drain electrode ohmic-connected to the electron supplying layer and a second source electrode and a second drain electrode ohmic-connected to the electron supplying layer,
wherein the gate electrode continuously extends along a path that extends between the first source electrode and the first drain electrode along a first direction, extends toward the second source electrode along a second direction perpendicular to the first direction and extends between the second source electrode and the second drain electrode along the first direction.
2. The semiconductor device of claim 1 , wherein the HEMT is a switching element in an antenna switch circuit of a communication device.
3. The semiconductor device of claim 2 , wherein a gate length of the gate electrode is 1 μm or less.
4. The semiconductor device of claim 1 , wherein the gate electrode is formed by a first gate portion serving as a gate of the HEMT and a second gate portion to which upper layer wiring is connected, with the first gate portion being disposed over the active region so as not to extend over the isolation region.
5. The semiconductor device of claim 2 , wherein the communication device is a mobile communication device.
6. The semiconductor device of claim 1 , wherein the substrate includes, as a main component, a compound semiconductor.
7. The semiconductor device of claim 6 , wherein the compound semiconductor is gallium arsenic.
8. The semiconductor device of claim 1 , wherein the electron supplying layer is of a first conductive type, and the isolation region is formed by introducing an impurity of a second conductive type to the substrate.
9. The semiconductor device of claim 8 , wherein the impurity of the second conductive type is hydrogen ions or boron ions.
10. A semiconductor device including a first channel type high electron mobility transistor (HEMT), the HEMT including:
a channel layer formed in an active region surrounded by an element separation region on a main surface of a substrate;
an electron supplying layer formed on the channel layer;
a gate electrode Schottky-connected to the electron supplying layer; and
a first source electrode and a first drain electrode ohmic-connected to the electron supplying layer and a second source electrode and a second drain electrode ohmic-connected to the electron supplying layer,
wherein the gate electrode continuously extends along a path that extends between the first source electrode and the first drain electrode in a first direction, extends toward the second source electrode in a second direction that intersects the first direction in plan view, and extends between the second source electrode and the second drain electrode in the first direction,
the gate length of the gate electrode is 1 μm or less, and
the substrate includes, as a main component, a compound semiconductor.
11. The semiconductor device of claim 10 , wherein the HEMT is a switching element in an antenna switch circuit of a communication device.
12. The semiconductor device of claim 10 , wherein the gate electrode is formed by a first gate portion serving as a gate of the HEMT and a second gate portion to which upper layer wiring is connected, with the first gate portion being disposed over the active region so as not to extend over the isolation region.
13. The semiconductor device of claim 11 , wherein the communication device is a mobile communication device.
14. The semiconductor device of claim 10 , wherein the compound semiconductor is gallium arsenic.
15. The semiconductor device of claim 10 , wherein the electron supplying layer is of a first conductive type, and the isolation region is formed by introducing an impurity of a second conductive type to the substrate.
16. A semiconductor device including a first channel type high electron mobility transistor (HEMT), the HEMT including:
a channel layer formed in an active region surrounded by an element separation region on a main surface of a substrate and having a X-axis perpendicular to a Y-axis in a plan view;
an electron supplying layer formed on the channel layer;
a gate electrode Schottky-connected to the electron supplying layer; and
the element separation region having formed thereon a first drain electrode, a first source electrode positioned adjacent the first drain electrode, a second source electrode formed positioned adjacent the first source electrode such that the first source electrode is positioned between the first drain electrode and the second source electrode along the X-axis, and a second drain electrode positioned adjacent the second source electrode; the first drain electrode, first source electrode, second source electrode and second drain electrode being ohmic-connected to the electron supplying layer,
wherein the gate electrode continuously extends from a first portion that extends between the first drain electrode and first source electrode along the Y-axis to a second portion that extends toward the second source electrode along the X-axis and to a third portion that extends between the second source electrode and the second drain electrode along the Y-axis.
17. The semiconductor device of claim 16 , wherein the HEMT is a switching element in an antenna switch circuit of a communication device.
18. The semiconductor device of claim 16 , wherein the gate electrode is formed by a first gate portion serving as a gate of the HEMT and a second gate portion to which upper layer wiring is connected, with the first gate portion being disposed over the active region so as not to extend over the element separation region.
19. The semiconductor device of claim 17 , wherein the communication device is a mobile communication device.
20. The semiconductor device of claim 16 , wherein the compound semiconductor is gallium arsenic.
21. The semiconductor device of claim 16 , wherein the electron supplying layer is of a first conductive type, and the element separation region is formed by introducing an impurity of a second conductive type to the substrate.