Method for patterning a magnetoresistive sensor
View Patent ↗A method for constructing a magnetoresistive sensor using an etch mask that is resistant to the material removal process used to define the sensor width and stripe height. The method may include the use of a Ta etch mask formed under a photoresist mask, and the use of an ion milling process to define the sensor. The etch mask remains substantially intact after performing the ion milling and therefore is readily removed by a later CMP process. The etch mask layer is also very resistant to high temperatures such as those used in a desired atomic layer deposition of alumina, which is used to deposit conformal layers of alumina around the sensor.
1. A method for manufacturing a magnetoresistive sensor, comprising:
depositing a plurality of sensor layers;
depositing a CMP stop material over the plurality of sensor layers;
depositing an etch mask material over the CMP stop material;
depositing a photoresist material over the etch mask material;
photolithographically patterning the photoresist material; and
performing a material removal process sufficiently to remove a desired amount of the sensor layers;
depositing an alumina fill layer by atomic layer deposition;
and wherein
the etch mask material comprises a material that is resistant to removal by the material removal process, the etch mask material is resistant to high temperatures that are necessary to perform the atomic layer deposition of the alumina fill layer and is easily removed after the sensor has been formed.
2. A method as in claim 1 , wherein the etch mask material comprises Ta.
3. A method as in claim 1 , wherein material removal process comprises reactive ion etching.
4. A method as in claim 1 , wherein the material removal process comprises ion milling.
5. A method as in claim 1 , wherein the material removal process comprises ion milling and the etch mask material comprises Ta.
6. A method as in claim 1 , wherein the etch mask material comprises an inorganic material.
7. A method as in claim 1 , wherein the etch mask material comprises a metal.
8. A method as in claim 1 , wherein the CMP stop material comprises diamond like carbon (DLC).
9. A method as in claim 1 , further comprising, before performing the material removal process, transferring the photolithographically patterned photoresist material to the underlying etch mask material and the CMP stop material.
10. A method as in claim 1 , further comprising, before performing the material removal process, transferring the photolithographically patterned photoresist material to the underlying etch mask layer and the CMP layer by performing a reactive ion etch (RIE).
11. A method as in claim 1 , further comprising after performing the material removal process, the alumina fill layer is deposited, and then depositing a layer of CMP resistant material.
12. A method as in claim 1 , further comprising after performing the material removal process and after depositing the alumina fill layer:
depositing a second layer of CMP resistant material; and
performing a CMP.
13. A method as in claim 12 wherein the second CMP resistant material comprises diamond like carbon (DLC).