Method for manufacturing a transparent element with invisible electrodes
A conductive pattern, made of a transparent conductive oxide, such as ITO including electrodes ( 2 ) and conductive paths ( 4 ) is formed on one face of a transparent substrate ( 3 ) made of sapphire or toughened glass, then coated with a first layer ( 5 ) of a transparent dielectric with a low refractive index, such as MgF 2 or LiF 2 , and then a second layer ( 7 ) of another transparent dielectric having a higher refractive index than the first, such as Al 2 O 3 , Ta 2 O 5 or DLC.
1. A method of manufacturing a transparent element with invisible electrodes formed by a transparent substrate one face of which is provided with a conductive pattern formed by electrodes, conductive paths and contact zones, wherein it includes the steps of:
depositing over the entire surface of the substrate a transparent conductive oxide film (TCO), removing via etching through a mask the zones of TCO that do not form the conductive pattern, then the residual parts of the mask, to form the invisible electrodes of the transparent element;
depositing a first layer of a transparent dielectric material, having a low refractive index (L), directly at least on the conductive patterned TCO; and
depositing directly at least on the first layer a second layer of another transparent dielectric material having a high refractive index (H) relative to that of the first layer.
2. The method according to claim 1 , wherein the transparent conductive oxide is a tin and indium oxide (ITO).
3. The method according to claim 2 , wherein the substrate is previously brought to a temperature of around 250° C. under oxygen partial pressure before deposition of the first dielectric layer is carried out.
4. The method according to claim 1 , wherein the steps of depositing the dielectric layers (L, H) are carried out in the same closed chamber.
5. The method according to claim 1 , wherein the dielectrics of the first and second layers are chosen from among the following compounds classed by order of increasing Al 2 O 3 refractive index; MgF 2 , LiF, SiO 2 , Si 3 N 4 , ZnS, TiO 2 , AIN, Ta 2 O 5 and DLC (diamond-like carbon).
6. The method according to claim 5 , wherein the dielectric of the first layer is a magnesium or lithium fluoride and that of the second layer, is alumina, tantalum pentoxide or diamond-like carbon.
7. The method according to claim 1 , wherein the first layer has a thickness comprised between 50 nm and 100 nm, preferably around 60 nm and wherein the second layer has a thickness comprised between 8 nm and 25 nm, preferably around 16 nm.
8. The method according to claim 1 , wherein the transparent substrate is made of sapphire or toughened glass.
9. The method according to claim 1 , wherein the steps of depositing the dielectric layers are repeated at least once keeping the order L, H.
10. The method according to claim 1 , wherein the electrodes form the sensors of a capacitive touch screen.
11. The method according to claim 1 , wherein the transparent element is a wristwatch glass.