Controllable electro-optic device having substrate trenches between electrodes
View Patent ↗An optical modulator which has substantially low loss and has an improvement in voltage reduction is disclosed having an electro-optic lithium niobate substrate. The substrate has first, second and third ridges extending along its surface. Extending along the first and second ridges are first and second waveguides. A first RF electrode extends over the first waveguide and a second slotted electrode including a first section extends over the second waveguide. A second section of the slotted extends parallel to and adjacent to the first section on the third ridge. In summary, this invention provides a slotted ground electrode wherein a slot is formed in the substrate between the slotted electrode.
1. A controllable optical device comprising:
an electro-optic substrate including first, second and third ridges extending along a surface thereof;
first and second waveguides extending within the first and second ridges, respectively;
a first electrode extending over the first waveguide; and
a second slotted electrode including a first section extending over the second waveguide, and a second section extending parallel to and adjacent to the first section on the third ridge.
2. A controllable optical device as defined in claim 1 wherein a slot is defined within the substrate between the first and second sections of the second slotted electrode, and wherein in operation, the second section is electrically coupled to the first section at high frequencies.
3. A controllable optical device as defined in claim 1 wherein both of the first and second sections are disposed on a same side of the first waveguide.
4. A controllable optical device as defined in claim 1 , wherein the first electrode is a signal electrode and wherein the second slotted electrode forms a ground electrode having two electrically coupled conductors portions of which are parallel.
5. A controllable optical device as defined in claim 1 , including a third electrode having at least a portion of which is parallel to the first electrode, wherein the first electrode disposed between the second electrode and the third electrode.
6. A controllable optical device as defined in claim 5 , wherein the third electrode is a slotted electrode and has a first section extending over a fourth ridge and a second parallel section extending over a fifth ridge.
7. A controllable optical device as defined in claim 2 , wherein slots are defined between adjacent ridges, and wherein the device is a z-cut lithium niobate modulator and is configured to form a Mach Zehnder interferometer.
8. A controllable optical device as defined in claim 7 , wherein the slots are formed by etching the electro-optic substrate to remove electro-optic material.
9. A controllable optical device as defined in claim 8 , wherein the slots defined within the substrate between adjacent ridges have a substantially uniform depth relative to adjacent ridges, which have a substantially uniform height.
10. A controllable Mach Zehnder interferometer as defined in claim 7 wherein at least some of the slots have a shallow end wall to promote bleed continuity and have a steep sidewall to achieve a sufficient voltage reduction, such that the sidewall is substantially steeper than the end wall.
11. An electro-optic modulator comprising:
a z-cut lithium niobate electro-optic substrate including first, second and third ridges extending along a surface thereof;
first and second waveguides extending within the first and second ridges, respectively, the waveguides configured as Mach Zehnder interferometer;
a first electrode extending over the first waveguide; and
a second slotted electrode including a first section extending over the second waveguide, and a second section extending parallel to and adjacent to the first section on the third ridge, wherein a plurality of conducting bridges span across a trench defined between the first section and the second section of the second slotted electrode.
12. An electro-optic modulator as defined in claim 11 , wherein valleys are defined adjacent to and between the first, second and third ridges by removal of electro-optic material from the substrate.
13. An electro-optic modulator as defined in claim 12 further comprising a third slotted electrode, wherein the first electrode is disposed between the third slotted electrode and the second slotted electrode, and wherein in operation, the second section is electrically coupled to the first section, at high frequencies.
14. An electro-optic modulator as defined in claim 13 , wherein the third electrode is a slotted electrode and has a first section extending over a fourth ridge and a second parallel section extending over a fifth ridge.
15. An electro-optic modulator as defined in claim 11 wherein the first, second and third ridges have slots defined there between within the substrate, and wherein some of the slots have a width W and wherein the other slots have a width Wo wherein Wo is less or equal to 2 W and wherein Wo is greater than or equal to ½ W.
16. An electro-optic modulator as defined in claim 11 wherein the a first electrode extending over the first waveguide is an RF electrode, and wherein the second slotted electrode is a ground electrode.
17. An electro-optic modulator as defined in claim 11 , wherein the second section is electrically coupled to the first section in operation at high frequencies and wherein at DC the first and second sections are electrically isolated.
18. An electro-optic modulator as defined in claim 13 wherein the third slotted electrode has a slot defined within the substrate between slotted electrode portions of the third slotted electrode.