Nonvolatile semiconductor memory device comprising a variable resistive element containing a perovskite-type crystal structure
View Patent ↗In a nonvolatile semiconductor memory device including a variable resistive element formed by sequentially stacking a lower electrode, a variable resistor with a perovskite-type crystal structure, and an upper electrode, at least one of the lower electrode and the upper electrode is a particulate electrode configured to include a particulate conductor aggregate so that the contact area with the variable resistor at an interface is effectively reduced to realize high initial resistance of the variable resistive element. Further, a film of the variable resistor is preferably formed so as to be in a highly crystalline state.
1. A nonvolatile semiconductor memory device comprising:
a variable resistive element formed by sequentially stacking a lower electrode, a variable resistor with a perovskite-type crystal structure, and an upper electrode, wherein
at least one of the lower electrode and the upper electrode is configured to include a particulate conductor aggregate, and total area of electrical point contacts between the particulate electrode and the variable resistor is smaller than an area of a whole interface between them.
2. A nonvolatile semiconductor memory device comprising:
a variable resistive element formed by sequentially stacking a lower electrode, a variable resistor with perovskite-type crystal structure, and an upper electrode, wherein
at least one of the lower electrode and the upper electrode is configured to include a particulate conductor aggregate, and
the particulate electrode is formed by dispersing the particulate conductors in an insulator.
3. The nonvolatile semiconductor memory device according to claim 1 , wherein the variable resistor is formed at a temperature of 500° C. or above.
4. The nonvolatile semiconductor memory device according to claim 1 , wherein the variable resistor is an epitaxial film or a partially epitaxial film.
5. The nonvolatile semiconductor memory device according to claim 1 , wherein the variable resistor in a low resistance state has a volume resistivity of 100 Ωcm or less.
6. The nonvolatile semiconductor memory device according to claim 2 , wherein a film of the variable resistor is formed at a film-forming temperature of 500° C. or above.
7. The nonvolatile semiconductor memory device according to claim 2 , wherein the variable resistor is an epitaxial film or a partially epitaxial film.
8. The nonvolatile semiconductor memory device according to claim 2 , wherein the variable resistor in a low resistance state has a volume resistivity of 100 Ωcm or less.