Method for implanting a cell channel ion of semiconductor device
View Patent ↗A method for implanting a cell channel ion of semiconductor device is disclosed. In accordance with the method, the bit line contact region and the edge portion of the channel region adjacent to the bit line contact region in the cell region are subjected to a selective cell channel implant process two times using a ion implant mask and rest of the cell region is subjected to cell channel implant process only once so that a impurity concentration of the storage node contact region is maintained at a lower level for minimal leakage current in the storage node contact region.
1. A method for implanting a cell channel ion of semiconductor device having a semiconductor substrate including a cell region, the method comprising performing first and second cell channel ion implant processes before the formation of a word line, wherein the first cell channel ion implant process is performed in a first portion and a second portion of the cell region and the second cell channel ion implant process is further performed in the first portion of the cell region so that an impurity concentration of the first portion is higher than that of the second portion,
wherein the first portion of the cell region comprises a bit line contact region and an edge portion of a channel region adjacent to the bit line contact region, and the second portion of the cell region comprises a remaining portion of the cell region other than the first portion of the cell region.
2. The method according to claim 1 , wherein the cell channel ion implant process comprises:
performing a first cell channel implant process to implant an impurity into a surface of the semiconductor substrate in the first portion and the second portion of the cell region;
forming a photoresist film pattern exposing the first portion of the cell region;
performing a second cell channel implant process to implant an impurity into the first portion of the cell region using the photoresist pattern as an ion implant mask; and
removing the photoresist film pattern.
3. The method according to claim 1 , wherein the cell channel ion implant process comprises:
forming a photoresist film pattern exposing the first portion of the cell region;
performing a first cell channel implant process to implant an impurity into the first portion of the cell region using the photoresist film pattern as an ion implant mask;
removing the photoresist film pattern; and
performing a second cell channel implant process to implant an impurity into a surface of the semiconductor substrate in the first portion and the second portion of the cell region.
4. The method according to claim 2 , wherein the photoresist film pattern includes a line pattern.
5. The method according to claim 2 , wherein a dose of the second cell channel implant process is 0.1 to 10 times of that of the first cell channel implant process.
6. The method according to claim 3 , wherein a dose of the first cell channel implant process is 0.1 to 10 times of that of the second cell channel implant process.
7. The method according to claim 2 , wherein the impurity of the first cell channel implant process is the same as or different from that of the second cell channel implant process.
8. The method according to claim 3 , wherein the impurity of the first cell channel implant process is the same as or different from that of the second cell channel implant process.