Transfer of optical element patterns on a same side of a substrate already having a feature thereon
A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.
1 . An optical element comprising:
a refractive optical element in a first surface of a substrate;
a diffractive optical element in the first surface of the substrate, the diffractive optical element in a separate portion of the substrate than the refractive optical element, the refractive and the diffractive optical elements having been transferred into the first surface of the substrate.
2 - 35 . (canceled)
36 . The optical element as claimed in claim 1 , further comprising alignment features on the first surface.
37 . The optical element as claimed in claim 1 , further comprising electro-optical elements on the first surface.
38 . The optical element as claimed in claim 1 , further comprising metal portions on the first surface.
39 . The optical element as claimed in claim 1 , further comprising one of dichroic portions and dielectric portions on the first surface.
40 . The optical element as claimed in claim 1 , further comprising a protective portion over the diffractive optical element.
41 . The optical element as claimed in claim 40 , wherein the protective portion is made of a same material as a refractive optical element pattern used to transfer the refractive optical element to the substrate.
42 . The optical element as claimed in claim 40 , wherein the protective portion is made of a same class of material as the refractive optical element, but of a different specific material.
43 . The optical element as claimed in claim 42 , wherein the protective portion is made of a first photoresist and a refractive optical element pattern used to transfer the refractive optical element to the substrate is made of a second photoresist, the first and second photoresist being different.
44 . The optical element as claimed in claim 43 , wherein the first photoresist does not reflow under conditions for reflowing the second photoresist.
45 . The optical element as claimed in claim 43 , wherein the first photoresist is resistant to removal under conditions for removing the second photoresist.