Fabrication method of polycrystalline silicon liquid crystal display device
A method for fabricating a polysilicon silicon liquid crystal display device is disclosed in which a contact hole connecting source and drain electrodes to an active layer is formed without a stepped portion. An insulation layer containing a porous silicon nitride layer is formed. Wet etching the contact hole through the porous silicon nitride layer and an underlying silicon oxide layer does not generate the stepped portion as the etch rates of the porous silicon nitride layer and the silicon oxide layer are the same. Because the stepped portion is not generated at a contact hole, disconnection of source and drain electrodes formed in the contact hole is prevented, thereby preventing deterioration of the liquid crystal display device from occurring.
1. A method for fabricating a transreflective liquid crystal display device, comprising:
forming an active layer on a substrate;
forming a first insulation layer including a silicon oxide layer on the active layer;
forming a gate electrode on the first insulation layer;
forming a second insulation layer including a porous silicon nitride layer on the gate electrode, the silicon nitride layer formed by deposition using a plasma including N 2 gas of about 1700 to 2300 sccm, NH 3 gas of about 600 to 800 sccm and SiH 4 gas of about 130 to 150 sccm under conditions of a voltage of about 1500 to 1700 V and pressure of about 1400 to 1600 mTorr;
forming a transparent electrode layer including Indium Tin Oxide (ITO) on the second insulation layer;
wet-etching the transparent electrode, the second insulation layer and the first insulation layer to form holes exposing the active layer;
forming a pixel electrode by patterning the transparent electrode;
forming a source electrode connected to the active layer through one of the holes and a drain electrode connected to the active layer and the pixel electrode through one of the holes;
forming a passivation layer on the source and drain electrodes, and the second insulation layer;
etching the passivation layer to form a hole exposing the drain electrode; and
forming a reflective electrode connected to the drain electrode.
2. The method of claim 1 , wherein forming the holes comprises:
applying a photoresist layer to the transparent electrode layer;
performing diffractive exposure on the photoresist layer such that a contact hole region in a pixel region is completely exposed, a pixel electrode region is not exposed and a remainder of the region on which the photoresist layer is applied is partially exposed; and
simultaneously wet-etching the transparent electrode layer, the second insulation layer and the first insulating layer of the contact hole region.
3. The method of claim 2 , wherein wet-etching the transparent electrode layer, the second insulation layer and the first insulation layer of the contact hole region is formed using a photoresist pattern formed by the diffractive exposure as an etching mask.
4. The method of claim 1 , wherein forming the pixel electrode comprises:
exposing a transparent electrode of a diffractive exposure region by ashing the diffractively-exposed photoresist layer; and
removing the exposed transparent electrode.