Fabrication method of thin film transistor
View Patent ↗The present invention provides a fabrication method of thin film transistor including a step of forming an amorphous silicon layer on a substrate, a step of forming a capping layer on the amorphous silicon layer, a step of forming a metal catalyst layer on the capping layer, a step of diffusing metal catalyst by selectively irradiating a laser beam onto the metal catalyst layer, and a step of crystallizing the amorphous silicon layer. The present invention has an advantage that a fabrication method of thin film transistor is provided, wherein the fabrication method of thin film transistor improves characteristics of device and obtains uniformity of the device by uniformly controlling diffusion of low concentration of metal catalyst through selective irradiation of laser beam and controlling size of grains and crystal growing position and direction in crystallization of amorphous silicon layer using super grain silicon method.
1. A fabrication method of thin film transistor comprising:
forming an amorphous silicon layer on a substrate;
forming a capping layer on the amorphous silicon layer;
forming a metal catalyst layer on the capping layer;
diffusing metal catalyst by selectively irradiating a laser beam onto the metal catalyst layer; and
crystallizing the amorphous silicon layer.
2. The fabrication method of thin film transistor according to claim 1 ,
wherein the laser beam is a dot type laser beam.
3. The fabrication method of thin film transistor according to claim 2 ,
wherein the dot type laser beam is formed in a circular, triangular, rectangular, trapezoidal or rhombic shape.
4. The fabrication method of thin film transistor according to claim 1 ,
wherein the laser beam is a line type laser beam.
5. The fabrication method of thin film transistor according to claim 1 ,
wherein the laser beam is irradiated through a patterned mask.
6. The fabrication method of thin film transistor according to claim 1 ,
wherein the capping layer is formed of a silicon nitride film or silicon oxide film.
7. The fabrication method of thin film transistor according to claim 1 ,
wherein the metal catalyst is nickel.
8. The fabrication method of thin film transistor according to claim 1 ,
wherein the metal catalyst layer has thickness of 2 Å or less.
9. The fabrication method of thin film transistor according to claim 1 ,
wherein the crystallization of the amorphous silicon layer is performed by thermal annealing.
10. A fabrication method of thin film transistor comprising:
forming an amorphous silicon layer on a substrate;
forming a capping layer on the amorphous silicon layer;
forming a metal catalyst layer on the capping layer;
forming a metal catalyst protection layer on the metal catalyst layer;
diffusing metal catalyst by selectively irradiating a laser beam onto the metal catalyst protection layer; and
crystallizing the amorphous silicon layer.
11. The fabrication method of thin film transistor according to claim 10 ,
wherein the laser beam is a dot type laser beam.
12. The fabrication method of thin film transistor according to claim 11 ,
wherein the dot type laser beam is formed in a circular, triangular, rectangular, trapezoidal or rhombic shape.
13. The fabrication method of thin film transistor according to claim 10 ,
wherein the laser beam is a line type laser beam.
14. The fabrication method of thin film transistor according to claim 10 ,
wherein the laser beam is irradiated through a patterned mask.
15. The fabrication method of thin film transistor according to claim 10 ,
wherein the capping layer is formed of a silicon nitride film or silicon oxide film.
16. The fabrication method of thin film transistor according to claim 10 ,
wherein the metal catalyst is nickel.
17. The fabrication method of thin film transistor according to claim 10 ,
wherein the metal catalyst layer has thickness of 2 Å or less.
18. The fabrication method of thin film transistor according to claim 10 ,
wherein the crystallization of the amorphous silicon layer is performed by thermal annealing.
19. The fabrication method of thin film transistor according to claim 10 ,
wherein the metal catalyst protection layer is formed of a silicon nitride film or silicon oxide film.
20. The fabrication method of thin film transistor according to claim 10 ,
wherein the metal catalyst protection layer is formed of a film that is capable of being etched together with the capping layer at the same time.