Inkjet printhead chip with a side-by-side nozzle arrangement layout
View Patent ↗An inkjet printhead chip includes an elongate wafer substrate that incorporates a drive circuitry layer. A plurality of nozzle arrangements is positioned side-by-side on the wafer substrate. Each nozzle arrangement has a generally rectangular layout when viewed in plan with longer sides extending from one longitudinal edge of the wafer substrate to an opposite longitudinal edge. Each nozzle arrangement includes a nozzle chamber structure that defines a nozzle chamber and an ink ejection port and that incorporates an active ink ejection member that is displaceable relative to the substrate to eject ink from the ink ejection port. An actuator arm is connected to the active ink ejection member. The actuator arm includes at least one passive anchor and a passive portion extending from the passive anchor and at least one active anchor and an active portion extending from the active anchor. The, or each active anchor is positioned proximate a shorter side of the nozzle arrangement and the, or each passive anchor is positioned inwardly of the active anchor. Both the active and passive portions interconnect the active ink ejection member and the anchors, with the portions at different distances from the substrate so that thermal expansion of the, or each active portion generates displacement of the arms relative to the substrate.
1. An inkjet printhead chip which comprises
an elongate wafer substrate that incorporates a drive circuitry layer;
a plurality of nozzle arrangements positioned side-by-side on the wafer substrate, each nozzle arrangement having a generally rectangular layout when viewed in plan with longer sides extending from one longitudinal edge of the wafer substrate to an opposite longitudinal edge, and each nozzle arrangement comprising
a nozzle chamber structure that defines a nozzle chamber and an ink ejection port and that incorporates an active ink ejection member that is displaceable relative to the substrate to eject ink from the ink ejection port; and
an actuator arm that is connected to the active ink ejection member, the actuator arm including at least one passive portion and at least one active portion, a first support structure connecting the, or each active portion to the drive circuitry layer, a second support structure connecting interconnecting said active and said passive portions, the second support structure being positioned proximate a shorter side of the nozzle arrangement and the first support structure being positioned inwardly of the second support structure.
2. An inkjet printhead chip as claimed in claim 1 including a plurality of actuator arms substantially aligned across a width of the nozzle arrangement.
3. An inkjet printhead chip as claimed in claim 2 wherein said first and second support structures are common to each of said actuator arms.
4. An inkjet printhead chip as claimed in claim 1 wherein said active portion is tapered in the direction of said second support structure.
5. An inkjet printhead chip as claimed in claim 1 wherein said active portion comprises titanium nitride.
6. An inkjet printhead chip as claimed in claim 5 wherein said passive portion is glass deposited on said titanium nitride.