Inkjet printhead chip with nozzle assemblies incorporating fluidic seals
View Patent ↗An inkjet printhead chip includes a wafer substrate that defines a plurality of ink inlet channels. A drive circuitry layer is positioned on the wafer substrate. A plurality of nozzle assemblies is positioned on the wafer substrate. Each nozzle assembly includes a nozzle chamber structure that comprises a fixed portion that bounds a respective ink inlet channel and a movable portion. The fixed and movable portions define a nozzle chamber in fluid communication with the ink inlet channel. The movable portion defines an ink ejection port and is movable relative to the fixed portion so that ink is ejected from the ink ejection port. Peripheries of the fixed and movable portions are shaped and relatively positioned so that ink in the nozzle chamber establishes a meniscus between the peripheries that defines a fluidic seal to inhibit the egress of ink during operation. An actuator is connected to the drive circuitry layer to receive an electrical signal from the drive circuitry layer and is arranged to act on the movable portion to displace the movable portion with respect to the fixed portion on receipt of the electrical signal.
1. An inkjet printhead chip which comprises
a wafer substrate that defines a plurality of ink inlet channels;
a drive circuitry layer positioned on the wafer substrate; and
a plurality of nozzle assemblies positioned on the wafer substrate, each nozzle assembly comprising
a nozzle chamber structure that comprises a fixed wall portion that bounds a respective ink inlet channel, and a movable roof portion, the fixed and movable portions defining a walls and a roof of a nozzle chamber in fluid communication with the ink inlet channel, the movable roof portion having an ink ejection port defined therethrough and being movable relative to the fixed portion to thereby cause ejection of ink from the ink ejection port, the fixed and movable portions being shaped and relatively positioned so that ink in the nozzle chamber establishes a meniscus between the fixed and moveable portions that defines a fluidic seal to inhibit the egress of ink during operation; and
an actuator arm that is connected, at one end, to the drive circuitry layer to receive an electrical signal from the drive circuitry layer to cause displacement of the actuator arm relative to the drive circuitry layer, and at the other end, to the movable portion to displace the movable portion with respect to the fixed portion on receipt of the electrical signal.
2. An ink jet printhead chip as claimed in claim 1 , in which each movable portion comprises a crown portion with a skirt portion that depends from the crown portion, the skirt portion and the fixed wall portion defining a peripheral wall of the respective nozzle chamber and the ink ejection port being defined in the respective crown portion.