A method for forming a sensor is provided, together with a sensor formed according to the method. Photoresist material is deposited on a surface of the sensor, and is then patterned and etched to form an array of microlens structures. The structures are spaced close together in a predetermined pattern so that when a reflow process is performed, the structures melt and coalesce to form a barrier. The barrier defines a region for constraining or channeling the flow of reagent and analyte samples used in bio-optical sensors.
1. A method for forming a sensor comprising:
forming an array of pixels in a substrate; and
forming a barrier of photoresist material on a surface of the array of pixels by
depositing photoresist material on the surface of the array of pixels,
patterning and etching the photoresist material so that a plurality of discrete photoresist material volumes are formed, and
deforming the plurality of photoresist material volumes so that adjacent photoresist material volumes are joined together for forming the barrier;
the barrier defining at least one region for constraining a bio-optical reagent or bio-optical analyte therein.
2. A method according to claim 1 , wherein the deforming comprises heating the plurality of photoresist material volumes.
3. A method according to claim 2 , wherein the photoresist material is patterned and etched so that the plurality of photoresist material volumes are spaced apart a predetermined distance, the predetermined distance resulting in the adjacent photoresist material volumes being joined together when heated.
4. A method according to claim 3 , wherein the predetermined distance is equal to or less than 2 μm.
5. A method according to claim 1 , further comprising depositing a bio-optical reagent in the at least one region.
6. A method according to claim 5 , wherein the at least one region comprises a plurality of regions; and further comprising depositing a different type of reagent in each of the plurality of regions.
7. A method according to claim 1 , wherein the sensor is a bio-optical sensor.
8. A method for forming a bio-optical sensor comprising:
forming an array of pixels in a substrate; and
forming a photoresist material layer on a surface of the array of pixels;
removing a portion of the photoresist material layer for forming a plurality of discrete photoresist material volumes; and
deforming the plurality of photoresist material volumes so that adjacent photoresist material volumes are joined together for forming a barrier, the barrier defining at least one region for constraining a bio-optical reagent or bio-optical analyte therein.
9. A method according to claim 8 , wherein the deforming comprises heating the plurality of photoresist material volumes.
10. A method according to claim 9 , wherein the plurality of photoresist material volumes are spaced apart a predetermined distance, the predetermined distance resulting in the adjacent photoresist material volumes being joined together when heated.
11. A method according to claim 10 , wherein the predetermined distance is equal to or less than 2 μm.
12. A method according to claim 8 , further comprising depositing a bio-optical reagent in the at least one region.
13. A method according to claim 12 , wherein the at least one region comprises a plurality of regions; and further comprising depositing a different type of reagent in each of the plurality of regions.