Liquid crystal display device and manufacturing method thereof
View Patent ↗A manufacturing method of a liquid crystal display device is provided. The method includes forming a gate line and a data line on a substrate; forming a thin film transistor connected to the gate and data lines, the thin film transistor including a gate electrode, a semiconductor layer, a source electrode and a drain electrode; forming a black matrix over the thin film transistor, the black matrix having an opening; forming a first conductive layer on a substrate having the black matrix such that the first conductive layer contacts a portion of the drain electrode; forming a color filter layer on the first conductive layer at a portion corresponding to the opening of the black matrix; partially etching a surface of the first conductive layer corresponding to the black matrix; forming a second conductive layer on the color filter layer such that the second conductive layer contacts the partially etched first conductive layer; and forming a pixel electrode by patterning the first and second conductive layers.
1. A manufacturing method of a liquid crystal display device, comprising:
forming a gate line and a data line on a substrate;
forming a thin film transistor connected to the gate and data lines, the thin film transistor including a gate electrode, a semiconductor layer, a source electrode and a drain electrode;
forming a black matrix over the thin film transistor, the black matrix having an opening;
forming a first conductive layer on a substrate having the black matrix such that the first conductive layer contacts a portion of the drain electrode;
forming a color filter layer on the first conductive layer at a portion corresponding to the opening of the black matrix;
partially etching a surface of the first conductive layer corresponding to the black matrix;
forming a second conductive layer on the color filter layer such that the second conductive layer contacts the partially etched first conductive layer; and
forming a pixel electrode by patterning the first and second conductive layers.
2. The method according to claim 1 , wherein the first conductive layer includes one of indium tin oxide (ITO), indium zinc oxide (IZO), indium tin zinc oxide (ITZO), aluminum, chromium, and molybdenum.
3. The method according to claim 1 , wherein the second conductive layer includes a transparent conductive material.
4. The method according to claim 1 , further comprising forming a first passivation layer between the thin film transistor and the black matrix.
5. The method according to claim 4 , further comprising forming a second passivation layer between the black matrix and the first conductive layer.
6. The method according to claim 1 , wherein a portion of the partially etched first conductive layer contacting the second conductive layer is thinner than a portion of the first conductive layer under the color filter layer.
7. The method according to claim 6 , wherein a difference between thicknesses of the portion of the partially etched first conductive layer contacting the second conductive layer and the portion of the first conductive layer under the color filter layer is equal to or more than an average surface roughness of the first conductive layer.
8. A manufacturing method of a liquid crystal display device, comprising:
forming a gate line and a gate electrode on a substrate;
forming a gate insulating layer on the gate line and the gate electrode;
forming a semiconductor layer on the gate insulating layer over the gate electrode;
forming a data line, a source electrode and a drain electrode, the data line crossing the gate line to define a pixel area, and the source and drain electrodes being disposed over the semiconductor layer and being spaced apart from each other, and the gate electrode, the semiconductor layer, the source electrode, and the drain electrodes form a thin film transistor;
forming a first passivation layer covering the thin film transistor;
forming a black matrix on the first passivation layer, the black matrix having a first opening corresponding to the pixel area and the first opening exposes the first passivation layer on a portion of the drain electrode;
forming a second passivation layer on a surface of the substrate having the black matrix;
forming a second opening by patterning the second passivation layer, the first passivation layer, and the gate insulating layer such that the second opening exposes a portion of the drain electrode;
forming a first conductive layer on the second passivation layer such that the first conductive layer contacts a portion of the drain electrode;
forming a color filter layer on the first conductive layer in the second opening;
partially etching a surface of the first conductive layer over the black matrix;
forming a second conductive layer on the color filter layer such that the second conductive layer contacts the partially etched the first conductive layer; and
forming a pixel electrode by patterning the first and second conductive layers, the pixel electrode being disposed in the pixel area.
9. The method according to claim 8 , wherein a portion of the partially etched first conductive layer contacting the second conductive layer is thinner than a portion of the first conductive layer under the color filter layer.
10. The method according to claim 9 , wherein a difference between thicknesses of the portion of the partially etched first conductive layer contacting the second conductive layer and the portion of the first conductive layer under the color filter layer is equal to or more than an average surface roughness of the first conductive layer.
11. A liquid crystal display device, comprising:
a substrate;
a gate line and a data line disposed on the substrate crossing each other to define a pixel area;
a thin film transistor disposed near the crossing of the gate line and the data line, the thin film transistor having a gate electrode, a semiconductor layer, a source electrode and a drain electrode;
a black matrix disposed on the thin film transistor and having an opening;
a first pixel electrode disposed on the black matrix and in the pixel area, the first pixel electrode contacting a portion of the drain electrode;
a color filter layer disposed on the first pixel electrode in the pixel area; and
a second pixel electrode on the color filter layer contacting the first pixel electrode, a portion of the first pixel electrode contacting the second pixel electrode being thinner than a portion of the first pixel electrode under the color filter layer.
12. The device according to claim 11 , wherein the first pixel electrode includes one of indium tin oxide (ITO), indium zinc oxide (IZO), indium tin zinc oxide (ITZO) aluminum, chromium, and molybdenum.
13. The device according to claim 11 , wherein the second pixel electrode includes a transparent conductive material.
14. The device according to claim 11 , further comprising a first passivation layer between the thin film transistor and the black matrix.
15. The device according to claim 14 , further comprising a second passivation layer between the black matrix and the first pixel electrode.
16. The device according to claim 11 , wherein a difference between thicknesses of the portion of the first pixel electrode contacting the second pixel electrode and the portion of the first pixel electrode under the color filter layer is equal to or more than an average surface roughness of the first pixel electrode.