Divided exposure method for making a liquid crystal display
View Patent ↗A divided exposure method for a photolithography process is disclosed, which uses a mask. The mask for an exposer having a left and right light intensity deviation includes a substrate; a first pattern in a middle of the substrate; and second and third patterns on left and right sides of the first pattern, respectively, wherein the first and second patterns compensate for the left and right light intensity deviation of the exposer.
1. A divided exposure method for a liquid crystal display using a mask having a non-overlapping part and left and right overlapping parts, wherein patterns at the left and right overlapping parts are different from a pattern of the non-overlapping part, the method comprising:
providing a substrate having a thin film;
forming a photoresist layer on the thin film;
providing the mask over a first shot area of the photoresist layer;
irradiating light onto the first shot area through the mask by an exposer;
positioning the mask to a second shot area of the photoresist layer, wherein the second shot area partially overlaps the first shot area such that the left and the right overlapping parts of the mask correspond to a portion of the first shot area; and
irradiating light onto the second shot area through the mask by the exposer, and
wherein the patterns at the left and right overlapping parts of the mask are different from each other in order to compensate for left and right exposure light intensity deviation of the exposer, and
wherein the mask is formed to have a critical dimension deviation opposite a light intensity difference of the exposer such that the patterns formed at the left and right overlapping parts of the mask compensate for the difference in light intensity of the left and right sides of the exposer.
2. A divided exposure method for a liquid crystal display using a mask comprising:
providing a substrate having a thin film;
forming a photoresist layer on the thin film, wherein the photoresist layer is divided into at least first and second shot areas;
irradiating a first light on the first shot area through the mask by an exposer;
positioning the mask to the second shot area; and
irradiating a second light on the second shot area through the mask by the exposer,
wherein the intensity of the second light exposed to a left side of the second shot area is substantially the same as the intensity of the first light exposed to a right side of the first shot area such that a critical dimension deviation caused by light exposure deviation in a boundary area is reduced, thereby minimizing a stitch stain in a liquid crystal display panel.
3. The method according to claim 2 , wherein the intensity of the second light is adjusted by controlling a scan speed or a luminous intensity of the exposer.
4. The method according to claim 2 , wherein the second shot area partially overlaps the first shot area.