Methods of fabricating nonvolatile memory device
View Patent ↗A fabricating method of a nonvolatile memory device is disclosed. A disclosed method comprises: implanting ions into an active region of a semiconductor substrate to form a well of a low voltage transistor and adjust its threshold voltage; implanting ions into an active region of the semiconductor substrate to form a well of a high voltage transistor and adjust its threshold voltage, thereby forming a conductive region; depositing an ONO layer on the semiconductor substrate; patterning and etching the ONO layer to form an ONO structure; and forming a gate oxide layer on the semiconductor substrate.
1. A method of fabricating a nonvolatile memory device comprising:
forming a nonvolatile memory structure, including:
implanting first ions into an active region of a semiconductor substrate to form a first well and to adjust a threshold voltage of a low voltage n-type MOS transistor and a threshold voltage of a high voltage n-type MOS transistor;
implanting second ions into active region of the semiconductor substrate to form a second well and to adjust a threshold voltage of a high voltage p-type MOS transistor and a threshold voltage of a low voltage p-type MOS transistor, thereby forming a conductive region;
depositing an ONO layer on the semiconductor substrate;
patterning and etching the ONO layer to form an ONO structure;
after forming the ONO structure, forming a first gate oxide layer on the semiconductor substrate;
removing the first gate oxide layer existing where the low voltage n-type MOS transistor and the low voltage p-type MOS transistor are to be formed; and
forming a second gate oxide layer for the low voltage n-type MOS transistor and the low voltage p-type MOS transistor; and
after forming the nonvolatile memory structure, forming a logic circuit.
2. A method as defined by claim 1 , wherein the ONO structure is formed by patterning and wet etching the ONO layer.
3. A method as defined by claim 1 , wherein the formation of the gate oxide layer includes a thermal oxidation process.