Method and apparatus for controlling charge transfer in CMOS sensors with a graded transfer-gate work-function
View Patent ↗An improved CMOS sensor integrated circuit is disclosed, along with methods of making the circuit and computer readable descriptions of the circuit.
1. An image sensor integrated circuit, comprising:
a plurality of photodetectors generating electrons excited by incident photons;
a plurality of nodes, wherein each of the plurality of photodetectors has a corresponding node of the plurality of nodes;
a plurality of transfer devices controlling a transfer of the electrons from said each of the plurality of photodetectors to the corresponding node, each of the plurality of transfer devices including:
a first terminal coupled to one of the plurality of photo detectors;
a second terminal coupled to one of the plurality of nodes; and
a body between the first terminal and the second terminal; and
a control terminal electrically coupled to the body, wherein the transfer of the electrons occurs through the body between the first terminal and the second terminal in response to a control voltage of sufficient value applied to the control terminal, the control terminal includes a first part and a second part, the first part of the control terminal closer than the second part of the control terminal to the first terminal, the second part of the control terminal closer than the first part of the control terminal to the second terminal, the control terminal having a nonconstant work function such that a difference between the nonconstant work function of the first part of the control terminal and the nonconstant work function of the second part of the control terminal create an electric field in the body tending to cause electrons in the body to move in a direction from the first terminal to the second terminal;
a plurality of reset devices, wherein each of the plurality of nodes has a corresponding reset device of the plurality of reset devices, and said each of the plurality of nodes is reset when the corresponding reset device is active;
row and column circuitry; and
a plurality of signal devices coupling the plurality of nodes to the row and column circuitry.
2. The circuit of claim 1 , wherein the nonconstant work function of the control terminal is caused by at least the second part of the control terminal having a higher n-type doping than the first part of the control terminal.
3. The circuit of claim 1 , wherein the nonconstant work function of the control terminal is caused by at least the first part of the control terminal having a higher p-type doping than the second part of the control terminal.
4. The circuit of claim 1 , wherein subtracting a Fermi level of the control terminal from a conduction band edge of the first part is equal to a first value greater than a second value equal to subtracting the Fermi level of the control terminal from a conduction band edge of the second part.
5. The circuit of claim 1 , wherein the body by the control terminal has a graded doping such that the body has a first part and a second part by the control terminal, the first part of the body being closer than the second part of the body to the first terminal, the second part of the body being closer than the first part of the body to the second terminal, and the first part of the body has a lower n-type doping than the second part of the body.
6. The circuit of claim 1 , further comprising:
a plurality of p-type regions isolating neighboring photodetectors from each other.
7. The circuit of claim 1 , wherein each of the plurality of transfer devices includes a dielectric between the control terminal and the body, the dielectric satisfying a lifetime specification of the image sensor integrated circuit when the control signal is applied with the channel formed, the dielectric failing the lifetime specification of the image sensor integrated circuit if the control signal is applied with at least one of the first terminal and the second terminal at a ground voltage of the image sensor integrated circuit.
8. The circuit of claim 1 , wherein the plurality of signal devices includes a plurality of row select transistors coupled to the row and column circuitry and a plurality of source follower transistors coupled to the plurality of nodes.
9. The circuit of claim 1 , wherein the plurality of photodetectors is a plurality of photo diodes.
10. The circuit of claim 1 , wherein each measurement of the total of the photons is corrected by correlated multiple sampling with a prior measurement of the total of the photons.
11. A computer readable description of an image sensor integrated circuit comprising:
a plurality of photodetectors generating electrons excited by incident photons;
a plurality of nodes, wherein each of the plurality of photodetectors has a corresponding node of the plurality of nodes;
a plurality of transfer devices controlling a transfer of the electrons from said each of the plurality of photodetectors to the corresponding node, each of the plurality of transfer devices including:
a first terminal coupled to one of the plurality of photodetectors;
a second terminal coupled to one of the plurality of nodes; and
a body between the first terminal and the second terminal; and
a control terminal electrically coupled to the body, wherein the transfer of the electrons occurs through the body between the first terminal and the second terminal in response to a control voltage of sufficient value applied to the control terminal, the control terminal includes a first part and a second part, the first part of the control terminal closer than the second part of the control terminal to the first terminal, the second part of the control terminal closer than the first part of the control terminal to the second terminal, the control terminal having a nonconstant work function such that a difference between the nonconstant work function of the first part of the control terminal and the nonconstant work function of the second part of the control terminal create an electric field in the body tending to cause electrons in the body to move in a direction from the first terminal to the second terminal;
a plurality of reset devices, wherein each of the plurality of nodes has a corresponding reset device of the plurality of reset devices, and said each of the plurality of nodes is reset when the corresponding reset device is active;
row and column circuitry; and
a plurality of signal devices coupling the plurality of nodes to the row and column circuitry.
12. The circuit of claim 11 , wherein the nonconstant work function of the control terminal is caused by at least the second part of the control terminal having a higher n-type doping than the first part of the control terminal.
13. The circuit of claim 11 , wherein the nonconstant work function of the control terminal is caused by at least the first part of the control terminal having a higher p-type doping than the second part of the control terminal.
14. The circuit of claim 11 , wherein subtracting a Fermi level of the control terminal from a conduction band edge of the first part is equal to a first value greater than a second value equal to subtracting the Fermi level of the control terminal from a conduction band edge of the second part.
15. The circuit of claim 11 , wherein the body by the control terminal has a graded doping such that the body has a first part and a second part by the control terminal, the first part of the body being closer than the second part of the body to the first terminal, the second part of the body being closer than the first part of the body to the second terminal, and the first part of the body has a lower n-type doping than the second part of the body.
16. The circuit of claim 11 , further comprising:
a plurality of p-type regions isolating neighboring photodetectors from each other.
17. The circuit of claim 11 , wherein each of the plurality of transfer devices includes a dielectric between the control terminal and the body, the dielectric satisfying a lifetime specification of the image sensor integrated circuit when the control signal is applied with the channel formed, the dielectric failing the lifetime specification of the image sensor integrated circuit if the control signal is applied with at least one of the first terminal and the second terminal at a ground voltage of the image sensor integrated circuit.
18. The circuit of claim 11 , wherein the plurality of signal devices includes a plurality of row select transistors coupled to the row and column circuitry and a plurality of source follower transistors coupled to the plurality of nodes.
19. The circuit of claim 11 , wherein the plurality of photodetectors is a plurality of photodiodes.
20. The circuit of claim 11 , wherein each measurement of the total of the photons is corrected by correlated multiple sampling with a prior measurement of the total of the photons.