IP Library Granted Patent US 7,418,021
Granted Patent B2
US 7,418,021 · App. 11/026,355 · Granted Aug 26, 2008

Optical apertures for reducing spontaneous emissions in photodiodes

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Quick Facts
Patent No.
US 7,418,021
App. No.
11/026,355
Granted
Aug 26, 2008
Kind
B2
Abstract

An optical structure that reduces the effects of spontaneous emissions from the active region of a laser. An optical structure includes optimizations to reduce the effects of spontaneous emissions. The optical structure includes a VCSEL with top and bottom DBR mirrors and an active region connected to the mirrors. The optical structure further includes a photodiode connected to the VCSEL. One or more optimizations may be included in the optical structure including optically absorbing materials, varying the geometry of the structure to change reflective angles, using optical apertures, changing the reflectivity of one or more mirrors, changing the photodiode to be more impervious to spontaneous emissions, and using ion implants to reduce photoluminescence efficiency.

Claims (21)

1. An optical structure comprising:

a VCSEL, the VCSEL comprising:

a top DBR mirror;

an active region coupled to the top DBR mirror; and

a bottom DBR mirror coupled to the active region;

a photodiode coupled to the VCSEL;

a tunnel diode that acts as a common connection between the VCSEL and the photodiode, the tunnel diode including a doped p layer and a doped n layer; and

an optical aperture formed between the VCSEL and the photodiode and configured to block spontaneous emissions.

2. The optical structure of 1 , wherein the optical aperture comprises an oxidized material.

3. The optical structure of 1 , wherein the optical aperture comprises an absorbing material.

4. A method of manufacturing an optical structure comprising:

forming a VCSEL, wherein forming the VCSEL comprises:

forming a top DBR mirror;

forming an active region coupled to the top DBR mirror; and

forming a bottom DBR mirror coupled to the active region;

forming a photodiode coupled to the VCSEL;

forming a tunnel diode that acts as a common connection between the VCSEL and the photodiode, the tunnel diode including a doped p layer and a doped n layer; and

forming an optical aperture formed between the VCSEL and the photodiode and configured to block spontaneous emissions.

5. The method of claim 4 , wherein forming the optical aperture comprises oxidizing a material.

6. The method of claim 4 , wherein the optical aperture comprises an absorbing material.

7. The method of claim 4 , wherein the optical aperture is formed from a layer with a high Al concentration interacting with an oxidizing agent.

Assignments (4)
PATENT RELEASE AND REASSIGNMENT Recorded Jul 5, 2022
From: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
To: II-VI INCORPORATED; MARLOW INDUSTRIES, INC.; EPIWORKS, INC.; LIGHTSMYTH TECHNOLOGIES, INC.; KAILIGHT PHOTONICS, INC.; COADNA PHOTONICS, INC.; OPTIUM CORPORATION; FINISAR CORPORATION; II-VI OPTICAL SYSTEMS, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; II-VI DELAWARE, INC.; II-VI OPTOELECTRONIC DEVICES, INC.; PHOTOP TECHNOLOGIES, INC.
Reel/Frame 060574/0001 →
SECURITY INTEREST Recorded Jul 1, 2022
From: II-VI INCORPORATED; II-VI DELAWARE, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; PHOTOP TECHNOLOGIES, INC.; COHERENT, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 060562/0254 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 1, 2020
From: FINISAR CORPORATION
To: II-VI DELAWARE, INC.
Reel/Frame 052286/0001 →
NOTICE OF GRANT OF SECURITY INTEREST IN PATENTS Recorded Sep 25, 2019
From: II-VI INCORPORATED; MARLOW INDUSTRIES, INC.; EPIWORKS, INC.; LIGHTSMYTH TECHNOLOGIES, INC.; KAILIGHT PHOTONICS, INC.; COADNA PHOTONICS, INC.; OPTIUM CORPORATION; FINISAR CORPORATION; II-VI OPTICAL SYSTEMS, INC.; M CUBED TECHNOLOGIES, INC.; II-VI PHOTONICS (US), INC.; II-VI DELAWARE, INC.; II-VI OPTOELECTRONIC DEVICES, INC.; PHOTOP TECHNOLOGIES, INC.
To: BANK OF AMERICA, N.A., AS ADMINISTRATIVE AGENT
Reel/Frame 050484/0204 →