IP Library Granted Patent US 7,604,905
Granted Patent B2
US 7,604,905 · App. 11/026,486 · Granted Oct 20, 2009

Photomasks

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Quick Facts
Patent No.
US 7,604,905
App. No.
11/026,486
Granted
Oct 20, 2009
Kind
B2
Abstract

Photomasks are disclosed. A disclosed example photomask comprises: a first pattern located along an axis of the photomask; at least one second pattern located a distance from and a predetermined angle to the first pattern; and slits made of Cr on at least one end of each of the first and second patterns, wherein the photomask is a Cr-less mask.

Claims (7)

1. A photomask comprising:

a first pattern disposed in alignment with a first axis of the photomask;

at least one second pattern disposed at a distance from, and at a predetermined angle to, the first pattern; and

slits made of Cr on at least one end of each of the first and second patterns,

wherein the photomask is a Cr-less mask.

2. A photomask as defined by claim 1 , wherein the slits comprise fine patterns, and each of the fine patterns has a narrower width than a corresponding one of the first and second patterns.

3. A photomask as defined by claim 2 , wherein the fine patterns are aligned parallel to a longitudinal axis of a corresponding one of the first and second patterns.