Component for fabricating an electronic device and method of fabricating an electronic device
View Patent ↗A component for fabricating the electronic device comprises a substrate and a conductive film provided on the substrate, in which the adhesion of the conductive film to the substrate is not greater than 0.1 N/cm. The adhesion of the conductive film to the substrate is weak enough to enable the conductive film to be readily peeled from the substrate. This makes it possible to form a component on a substrate other than the substrate used during film formation, thereby greatly increasing the degree of product configuration freedom. If the adhesion of a lower conductive film on the substrate side is made to be not greater than 0.04 N/cm, it becomes very easy to peel the conductive film from the substrate.
1. A component for fabricating an electronic device comprising a substrate, a conductive film formed on a surface of the substrate and a functional film formed on the conductive film, wherein adhesion of the conductive film to the substrate is equal to or less than 0.1 N/cm, wherein the functional film includes at least one of a piezoelectric material and a ferroelectric material, and wherein said conductive film is a metallic film having one of a single orientation in a (111) plane of a face-centered cubic structure and a single orientation in a (0001) plane of a hexagonal close-packed structure.
2. The component for fabricating the electronic device as claimed in claim 1 , wherein said adhesion is equal to or less than 0.04 N/cm.
3. The component for fabricating the electronic device as claimed in claim 1 , wherein an X-ray rocking curve full width at half maximum of the conductive film is equal to or less than 2 degrees.
4. The component for fabricating the electronic device as claimed in claim 1 , farther comprising another conductive film formed on the functional film.