Surface acoustic wave device
View Patent ↗The present invention provides a surface acoustic wave device that allows a plurality of surface acoustic wave filters to be formed on a single chip and permits greater miniaturization. The surface acoustic wave device comprises a piezoelectric substrate, a first surface acoustic wave resonator formed on the piezoelectric substrate, and a second surface acoustic wave resonator formed on the piezoelectric substrate in the surface acoustic wave propagation direction of the first surface acoustic wave resonator. The positions in which the first and second surface acoustic wave resonators are formed on the piezoelectric substrate are in an at least partially overlapping relationship in a surface acoustic wave propagation region that is defined by virtually extending the respective openings of the first and second surface acoustic wave resonators. The surface acoustic wave device further comprises a part for dividing the overlap surface acoustic wave propagation region into an upper half and a lower half and for affording the phases of surface acoustic waves that are propagated by the first surface acoustic wave resonator a mutually antiphase relationship in the upper-half region and lower-half region thus divided.
1. A surface acoustic wave device, comprising:
a piezoelectric substrate;
a first surface acoustic wave resonator formed on the piezoelectric substrate;
a second surface acoustic wave resonator formed on the piezoelectric substrate in the surface acoustic wave propagation direction of the first surface acoustic wave resonator,
wherein the positions in which the first and second surface acoustic wave resonators are formed on the piezoelectric substrate are in an at least partially overlapping relationship in a surface acoustic wave propagation region that is defined by virtually extending the respective openings of the first and second surface acoustic wave resonators; and
a phase control portion for dividing the overlap surface acoustic wave propagation region into an upper half and a lower half and for affording the phases of surface acoustic waves that are propagated by the first surface acoustic wave resonator a mutually antiphase relationship in the upper-half region and lower-half region thus divided.
2. A surface acoustic wave device, comprising:
a piezoelectric substrate;
a first surface acoustic wave resonator formed on the piezoelectric substrate;
a second surface acoustic wave resonator formed on the piezoelectric substrate in the surface acoustic wave propagation direction of the first surface acoustic wave resonator,
wherein the positions in which the first and second surface acoustic wave resonators are formed on the piezoelectric substrate are in an at least partially overlapping relationship in a surface acoustic wave propagation region that is defined by virtually extending the respective openings of the first and second surface acoustic wave resonators; and
a phase control portion for dividing the overlap surface acoustic wave propagation region into a plurality of regions and affording the phases of surface acoustic waves that are propagated by the first surface acoustic wave resonator a mutually antiphase relationship in the upper-half region and lower-half region of the respective regions thus divided.
3. The surface acoustic wave device according to claim 1 or 2 , wherein the phase control portion for affording the phases of the surface acoustic waves propagated by the first surface acoustic wave resonator a mutually antiphase relationship are a metallic film that is formed on the piezoelectric substrate between the first and second surface acoustic wave resonators and that comprises a cutout of length L subject to the following relation in correspondence with the upper-half region or lower-half region of the overlap surface acoustic wave propagation region:
L=Vm*Vf* (2 n+ 1)/(2* Vf−Vm )* f )( n= 1,2 . . . )
(where Vm is the velocity on the metallic film, Vf is the velocity in the region without the metallic film, and f is the drive frequency).
4. The surface acoustic wave device according to claim 1 or 2 , wherein the phase control portion for affording the phases of the surface acoustic waves propagated by the first surface acoustic wave resonator a mutually antiphase relationship are a metallic film that is formed on the piezoelectric substrate between the first and second surface acoustic wave resonators and that is of length L subject to the following relation in correspondence with the upper-half region or lower-half region of the overlap surface acoustic wave propagation region:
L=Vm*Vf* (2 n+ 1)/(2* Vf−Vm )* f )( n= 1,2 . . . )
(where Vm is the velocity on the metallic film, Vf is the velocity in the region without the metallic film, and f is the drive frequency of the first surface acoustic wave resonator).