Patent Application
Utility
App. No. 11/039,873
· Confirmation No. 3165
Sputtering apparatus and sputter film deposition method
Abandoned -- After Examiner's Answer or Board of Appeals Decision
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2012-08-23 | APND |
Notice - Defective Notice of Appeal | 2 | View | |
| 2012-07-23 | APDS |
Dismissal of Appeal | 3 | View | |
| 2012-07-19 | AP_DK_M |
Appeal Docketing Notice | 2 | View | |
| 2012-05-11 | AP/W |
Request to Withdraw Appeal by Appellant | 1 | View | |
| 2012-05-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-05-11 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2012-04-10 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 2 | View | |
| 2012-03-30 | APEA |
Examiner's Answer to Appeal Brief | 32 | View | |
| 2011-12-20 | AP.B |
Appeal Brief Filed | 20 | View | |
| 2011-12-20 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-12-20 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-12-20 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2011-10-21 | N/AP |
Notice of Appeal Filed | 1 | View | |
| 2011-10-21 | XT/ |
Extension of Time | 1 | View | |
| 2011-10-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-10-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-07-11 | CTNF |
Non-Final Rejection | 22 | View | |
| 2011-07-11 | 892 |
List of references cited by examiner | 1 | View | |
| 2011-07-11 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-07-11 | SRNT |
Examiner's search strategy and results | 6 | View | |
| 2011-05-11 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 3 | View | |
| 2011-04-29 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2011-04-29 | XT/ |
Extension of Time | 1 | View | |
| 2011-04-29 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2011-04-29 | CLM |
Claims | 6 | View | |
| 2011-04-29 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2011-04-29 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-04-29 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-04-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-04-08 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2011-03-21 | A.NE |
Response After Final Action | 1 | View | |
| 2011-03-21 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2011-03-21 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-03-21 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-03-21 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2011-03-21 | XT/ |
Extension of Time | 1 | View | |
| 2010-11-29 | CTFR |
Final Rejection | 20 | View | |
| 2010-11-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-09-09 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2010-09-09 | CLM |
Claims | 6 | View | |
| 2010-09-09 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2010-09-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-09-09 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2010-09-09 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-06-09 | CTNF |
Non-Final Rejection | 18 | View | |
| 2010-06-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2010-06-09 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-06-09 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2010-02-19 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2010-02-19 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2010-02-19 | CLM |
Claims | 6 | View | |
| 2010-02-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2010-02-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-02-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-02-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-02-17 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 3 | View | |
| 2009-11-19 | CTFR |
Final Rejection | 16 | View | |
| 2009-11-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-11-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-11-19 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2009-07-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2009-07-22 | CLM |
Claims | 7 | View | |
| 2009-07-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2009-07-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-07-22 | TRAN.LET |
Transmittal Letter | 1 | View | |
| 2009-07-22 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-04-22 | CTNF |
Non-Final Rejection | 12 | View | |
| 2009-04-22 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-04-22 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-04-22 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2009-04-22 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-02-24 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2009-02-24 | XT/ |
Extension of Time | 1 | View | |
| 2009-02-24 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-02-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-02-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-02-12 | CTAV |
Advisory Action (PTOL-303) | 3 | View | |
| 2009-01-26 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2009-01-26 | CLM |
Claims | 7 | View | |
| 2009-01-26 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2009-01-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-01-26 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2009-01-26 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2009-01-12 | EXIN |
Examiner Interview Summary Record (PTOL - 413) | 1 | View | |
| 2008-10-29 | CTFR |
Final Rejection | 12 | View | |
| 2008-10-29 | 892 |
List of references cited by examiner | 1 | View | |
| 2008-10-29 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2008-10-29 | FOR |
Foreign Reference | 10 | View | |
| 2008-10-29 | SRNT |
Examiner's search strategy and results | 8 | View | |
| 2008-09-23 | DISQ |
Terminal Disclaimer review decision | 1 | View | |
| 2008-08-18 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2008-08-18 | CLM |
Claims | 5 | View | |
| 2008-08-18 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2008-08-18 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2008-08-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-08-18 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-08-18 | DIST |
Terminal Disclaimer Filed | 1 | View | |
| 2008-08-18 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2008-05-16 | CTNF |
Non-Final Rejection | 11 | View | |
| 2008-05-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2008-05-16 | FWCLM |
Index of Claims | 1 | View | |
| 2008-05-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2008-05-16 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2008-05-16 | SRNT |
Examiner's search strategy and results | 7 | View | |
| 2008-05-16 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2008-05-16 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2008-05-16 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2008-05-16 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2008-04-18 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2008-04-18 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-04-18 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2008-03-20 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2008-01-26 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2006-08-04 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2005-09-07 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2005-09-07 | FOR |
Foreign Reference | 6 | View | |
| 2005-05-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2005-01-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2005-01-24 | SPEC |
Specification | 82 | View | |
| 2005-01-24 | CLM |
Claims | 12 | View | |
| 2005-01-24 | ABST |
Abstract | 1 | View | |
| 2005-01-24 | DRW |
Drawings-only black and white line drawings | 34 | View | |
| 2005-01-24 | OATH |
Oath or Declaration filed | 5 | View | |
| 2005-01-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-01-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-01-24 | A.PE |
Preliminary Amendment | 1 | View | |
| 2005-01-24 | SPEC |
Specification | 1 | View | |
| 2005-01-24 | CLM |
Claims | 4 | View | |
| 2005-01-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2005-01-24 | ADS |
Application Data Sheet | 3 | View | |
| 2005-01-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2005-01-24 | FRPR |
Certified Copy of Foreign Priority Application | 1 | View | |
| 2005-01-24 | 136A |
Authorization for Extension of Time all replies | 2 | View | |
| 2005-01-24 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2005-01-24 | FWCLM |
Index of Claims | 1 | View |
Inventors
Eiji Shidoji
Kanagawa, JAPAN
Eiichi Ando
Kanagawa, JAPAN
Tomohiro Yamada
Kanagawa, JAPAN
Takahiro Mashimo
Kanagawa, JAPAN
Attorneys & Agents of Record
Classification
USPC
204/192.12
C23C14/352
C23C14/505
C23C14/547
C23C14/568
G02B1/10
H01J37/32779
H01J37/3405
Prosecution
- Examiner
- BRAYTON, JOHN JOSEPH
- Art Unit
- 1724
- Customer No.
- 22850
- Docket No.
- 262965US2 DIV
- Confirmation No.
- 3165
Foreign Priority
2001-031004
·
2001-02-07
·
JAPAN
2001-220942
·
2001-07-23
·
JAPAN
2001-383069
·
2001-12-17
·
JAPAN
Publication
- Pub. No.
- US20050121311A1
- Pub. Date
- 2005-06-09
CORPORATE ADDRESS CHANGE
Recorded 2011-11-09
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Quick Facts
- App. No.
- 11/039,873
- Filed
- 2005-01-24
- Pub. No.
- US20050121311A1
- Examiner
- BRAYTON, JOHN JOSEPH
- Art Unit
- 1724
External Links