IP Library Granted Patent US 7,569,847
Granted Patent B2
US 7,569,847 · App. 11/040,664 · Granted Aug 4, 2009

Methods of fabricating nanostructures and nanowires and devices fabricated therefrom

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Quick Facts
Patent No.
US 7,569,847
App. No.
11/040,664
Granted
Aug 4, 2009
Kind
B2
Abstract

One-dimensional nanostructures having uniform diameters of less than approximately 200 nm. These inventive nanostructures, which we refer to as “nanowires”, include single-crystalline homostructures as well as heterostructures of at least two single-crystalline materials having different chemical compositions. Because single-crystalline materials are used to form the heterostructure, the resultant heterostructure will be single-crystalline as well. The nanowire heterostructures are generally based on a semiconducting wire wherein the doping and composition are controlled in either the longitudinal or radial directions, or in both directions, to yield a wire that comprises different materials. Examples of resulting nanowire heterostructures include a longitudinal heterostructure nanowire (LOHN) and a coaxial heterostructure nanowire (COHN).

Claims (36)

1. A nanowire, comprising:

a core of a first material at least partially surrounded by a sheath of a compositionally different non-amorphous material;

wherein said nanowire is configured to be selected from a population of nanowires, said population of nanowires having a substantially uniform inter-wire diameter of less than 50% RMS.

2. A nanowire as recited in claim 1 , wherein each of said core and said sheath comprises a semiconductor material.

3. A nanowire as recited in claim 1 , wherein at least one of said core and said sheath comprises a doped semiconductor material.

4. A nanowire as recited in claim 1 , wherein at least one of said core and said sheath comprises a substantially crystalline material.

5. A nanowire as recited in claim 1 , wherein at least one of said core and said sheath has a diameter of less than approximately 200 nm.

6. A nanowire as recited in claim 5 , wherein said at least one of said core and said sheath has a diameter that does not vary by more than about 10% over the length of said core or sheath.

7. A nanowire as recited in claim 5 , wherein said at least one said core and said sheath has a diameter ranging from about 5 nm to about 50 nm.

8. A nanowire as recited in claim 1 , further comprising an electrode coupled to at least one of said core and said sheath.

9. A nanowire as recited in claim 1 , wherein said core comprises Si and said sheath comprises Si/Ge.

10. A nanowire as recited in claim 1 , wherein said nanowire transitions from said core to said sheath over a distance ranging from about 1 atomic layer to about 20 nm.

11. A nanowire as recited in claim 1 , wherein at least one of said core and said sheath comprises a substantially monocrystalline material.

12. A nanowire as recited in claim 1 , wherein said sheath comprises a substantially crystalline material.

13. A nanowire as recited in claim 12 , wherein said substantially crystalline material is substantially monocrystalline.

14. A nanowire as recited in claim 1 , wherein the nanowire is configured to be selected from a population of nanowires, said population of nanowires having a substantially uniform diameter of less than about 20% rms.

15. A nanowire as recited in claim 1 , wherein the nanowire is configured to be selected from a population of nanowires, said population of nanowires having a substantially uniform diameter of less than about 10% rms.

16. A nanowire as recited as in claim 1 , comprising two or more sheath layers surrounding said core.

17. A nanowire as recited in claim 1 , wherein said sheath comprises a semiconductor or a polymer material.

18. A nanowire, comprising:

a core of a first material at least partially surrounded by a sheath of a compositionally different non-amorphous material;

wherein said nanowire is configured to be selected from a population of nanowires, said population of nanowires having a substantially uniform diameter of less than 50% RMS; and

wherein said core comprises at least first and second segments of compositionally different materials.

19. A nanowire, comprising:

a core of a first material at least partially surrounded by a sheath of a compositionally different non-amorphous material;

wherein said nanowire is configured to be selected from a population of nanowires, said population of nanowires having a substantially uniform diameter of less than 50% RMS; and

wherein said sheath comprises at least first and second segments of compositionally different materials.

20. A nanowire, comprising:

a core of a first material at least partially surrounded by a sheath of a compositionally different non-amorphous material;

wherein said nanowire is configured to be selected from a population of nanowires, said population of nanowires having a substantially uniform diameter of less than 50% RMS; and

wherein said core comprises a single-segment core which is only partially surrounded by said sheath.

21. A population of nanowires, comprising:

an array of individual nanowires each having a core of a first material at least partially surrounded by a sheath of a compositionally different non-amorphous material;

wherein said population of nanowires has a substantially uniform inter-wire diameter of less than 50% RMS.

22. A population of nanowires as recited in claim 21 , wherein said population of nanowires has a substantially uniform diameter of less than about 20% rms.

23. A population of nanowires as recited in claim 21 , wherein said population of nanowires has a substantially uniform diameter of less than about 10% rms.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 18, 2018
From: MAJUMDAR, ARUN; SHAKOURI, ALI; SANDS, TIMOTHY D.; YANG, PEIDONG; MAO, SAMUEL S.; RUSSO, RICHARD E.; FEICK, HENNING; KIND, HANNES; WEBER, EICKE R.; HUANG, MICHAEL; YAN, HAOQUAN; WU, YIYING; FAN, RONG
To: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
Reel/Frame 044658/0836 →
RELEASE OF SECURITY INTEREST Recorded Jun 12, 2013
From: NANOSYS, INC.
To: NANOSYS, INC.
Reel/Frame 030599/0907 →
SECURITY AGREEMENT Recorded Apr 25, 2013
From: PRVP HOLDINGS, LLC
To: NANOSYS, INC.
Reel/Frame 030285/0829 →