Directly photodefinable polymer compositions and methods thereof
View Patent ↗The present invention relates to a directly photoimageable polymer composition (DPPC) and methods for its use in forming microelectronic and optoelectronic devices. Such DPPC encompasses a polymer having at least one norbornene-type repeat unit having a pendant silyl containing radical and at least one norbornene-type repeat unit having an acrylate containing radical.
1. A directly photodefinable polymer composition (DPPC) comprising:
a polymer comprising a first norbornene-type repeat unit having a pendant silyl group and a second norbornene-type repeat unit having a pendant acrylate-type group, represented by the structure below:
where n and m are independently each an integer from 1 to 5000, one of R 1 and R 2 is an acrylate-type group and the other is a silyl group;
a solvent; and
a photoinitiator.
2. The polymer of claim 1 , where the second norbornene-type repeat unit is derived from a norbornene-type monomer represented by:
where R 5 represents hydrogen, a linear or branched C 1 -C 4 hydrocarbon, a nitrile (CN), a C 1 -C 3 perfluorocarbon, an aromatic, or a halogen (F, Cl, Br), A represents a C 1 -C 3 alkyl or (CH 2 ) q —(CR e R f )—O—(CH 2 ) q — where q independently represents an integer from 0 to 3 and R e and R f represent hydrogen, a C 1 -C 5 alkyl, or a C 1 -C 3 perfluorocarbon.
3. The polymer of claim 2 , where the first norbornene-type repeat unit is derived from a norbornene-type monomer represented by:
where n is 0, R 1 , R 2 , R 3 and R 4 independently represent hydrogen and where one of R 1 -R 4 is —(CH 2 ) x —Si(R a R b R c ) 3 , where x is an integer from 0 to 6, and R a , R b and R c are, in any combination, independently a C 1 -C 4 alkyl, a C 1 -C 4 alkoxy or a halogen.
4. The polymer of claim 2 , where the first norbornene-type repeat unit is derived from a norbornene-type monomer represented by:
where n is 0, R 1 , R 2 , R 3 and R 4 independently represent hydrogen and where one of R 1 -R 4 is —(CH 2 ) x —Si(R a R b R c ) 3 , where x is an integer from 0 to 6, and each of R a , R b , and R c are the same and are selected from methoxy, ethoxy, propoxy, butoxy, pentoxy groups and chlorine.
5. The polymer of claim 2 , where the first norbornene-type repeat unit is derived from a norbornene-type monomer selected from the group of POSS NB monomers consisting of 1020NB, 1021NB, 1022NB, 1034NB, 1035NB and 1038NB.
6. The polymer of claim 1 , further comprising a third norbornene-type repeat unit, such repeat unit represented by:
where n is an integer from 0 to 5, R 6 to R 9 independently represent hydrogen, a hydrocarbyl or a functional substituent; where the hydrocarbyl is a linear or branched (C 1 -C 10 ) alkyl, a linear or branched (C 2 -C 10 ) alkenyl, a linear or branched (C 2 -C 10 ) alkynyl, a linear or branched (C 5 -C 12 ) cycloalkyl, a (C 6 -C 18 ) aryl, or a (C 7 -C 24 ) aralkyl, or where one of R 6 or R 7 taken together with one of R 8 or R 9 and with the two ring carbon atoms to which they are attached represents a saturated or unsaturated C 5 -C 12 cyclic group containing or a C 6 -C 14 aryl group; and
where the functional substituent is independently a radical selected from —(CH 2 ) m —CH(CF 3 ) 2 —O—CH 2 —O—CH 3 , (CH 2 ) m —CH(CF 3 ) 2 —O—C(O)—O—C(CH 3 ) 3 , —(CH 2 ) m —C(CF 3 ) 2 —OH, (CH 2 ) m —C(O)NH 2 , (CH 2 ) m —C(O)Cl, —(CH 2 ) m —C(O)OR*, (CH 2 ) m —OR*, —(CH 2 ) m —OC(O)R*, and —(CH 2 ) m —C(O)R*, where m independently represents an integer from 0 to 10 and R* independently represents hydrogen or a hydrocarbyl, as defined above.
7. The polymer of claim 6 , where the second norbornene-type repeat unit is derived from a norbornene-type monomer represented by:
where R 5 represents hydrogen, a linear or branched C 1 -C 4 hydrocarbon, a nitrile (CN), a C 1 -C 3 perfluorocarbon, an aromatic, or a halogen (F, Cl, Br), A represents a C 1 -C 3 alkyl or (CH 2 ) q —(CR e R f )—O—(CH 2 ) q — where q independently represents an integer from 0 to 3 and R e and R f represent hydrogen, a C 1 -C 5 alkyl, or a C 1 -C 3 perfluorocarbon;
the first norbornene-type repeat unit is derived from a norbornene-type monomer selected from the group of POSS NB monomers 1020NB, 1021NB, 1022NB, 1034NB, 1035NB and 1038NB, or
the third norbornene-type repeat unit is derived from a norbornene-type monomer represented by:
where n is 0, one of R 1 , R 2 , R 3 and R 4 —(CH 2 ) x —Si(R a R b R c ) 3 , where x is an integer from 0 to 6, and the others of R 1 -R 4 independently represent hydrogen, and where
R a , R b and R c are either independently selected from a C 1 -C 4 alkyl, a C 1 -C 4 alkoxy and a halogen, in any combination, or each of Ra, Rb, and Rc are the same and are selected from methoxy, ethoxy, propoxy, butoxy, pentoxy groups and chlorine.