Method and apparatus for transferring substrates
View Patent ↗The present invention is directed to a method for transferring substrates by receiving a first substrate at a first substrate receiving station in a first transfer unit capable of holding at least two substrates, moving the first transfer unit containing only the first substrate along a conveying line to a second substrate receiving station, causing the first transfer unit to receive a second substrate at the second substrate receiving station; and transferring the first and second substrates simultaneously to a substrate transfer station.
1. A method for transferring substrates which comprises in sequence:
a) receiving a first substrate at a first substrate receiving station in a first transfer unit capable of holding at least two substrates;
b) moving the first transfer unit containing only the first substrate along a conveying line to a second substrate receiving station;
c) causing the first transfer unit to receive a second substrate at said second substrate receiving station; and
d) transferring said first and second substrates simultaneously to a substrate transfer station.
2. The method of claim 1 , wherein steps a) through d) are repeated as a continuous process.