Organic light-emitting diode (OLED) and method of fabrication thereof
View Patent ↗An OLED includes a substrate having a circuit region and a pixel region. At least one circuit Thin Film Transistor (TFT) and at least one pixel TFT are respectively arranged on the circuit region and the pixel region. Each TFT has a semiconductor layer, a gate electrode, a source electrode and a drain electrode. A pixel electrode is electrically connected to one of the source and drain electrodes of the pixel TFT. At least one silicon nitride layer is arranged between the source and drain electrodes and the substrate and is opened in the entire pixel region.
1. An Organic Light-Emitting Display (OLED) comprising:
a substrate including a circuit region and a pixel region;
at least one circuit Thin Film Transistor (TFT) and at least one pixel TFT respectively arranged on the circuit region and the pixel region, each TFT including a semiconductor layer, a gate electrode, a source electrode and a drain electrode;
a pixel electrode electrically connected to one of the source and drain electrodes of the at least one pixel TFT; and
at least one silicon nitride layer arranged only between the source and drain electrodes of the at least one circuit TFT and the substrate, and silicon nitride layers being absent from the entire pixel region;
wherein each circuit TFT includes the source and drain electrodes directly contacting the silicon nitride layer which in turn directly contacts a silicon dioxide layer which in turn directly contacts the gate electrode; and
wherein each pixel TFT includes the source and drain electrodes directly contacting a silicon dioxide layer which in turn directly contacts the gate electrode.
2. The OLED according to claim 1 , each circuit TFT further comprising a silicon nitride layer and a silicon dioxide layer between the gate electrode and the semiconductor layer, wherein the gate electrode directly contacts the silicon nitride layer which in turn directly contacts the silicon dioxide layer which in turn directly contacts the semiconductor layer; and
each pixel TFT further comprising a silicon dioxide layer between the gate electrode and the semiconductor layer, wherein the gate electrode directly contacts the silicon dioxide layer which in turn directly contacts the semiconductor layer.
3. The OLED according to claim 1 , wherein the silicon nitride layer comprises one of silicon nitride (SiNx) and silicon oxynitride (SiON).
4. The OLED according to claim 1 , each circuit TFT further comprising a silicon nitride layer and a silicon dioxide layer between the semiconductor layer and the substrate, wherein the semiconductor layer directly contacts the silicon dioxide layer which in turn directly contacts the silicon nitride layer which in turn directly contacts the substrate; and
the each pixel TFT further comprising a silicon dioxide layer between the semiconductor layer and the substrate, wherein the semiconductor layer directly contacts the silicon dioxide layer which in turn directly contacts the substrate.
5. The OLED according to claim 1 , wherein the semiconductor layer comprises a polysilicon layer.
6. The OLED according to claim 1 , wherein the pixel electrode comprises a transparent electrode.
7. The OLED according to claim 1 , further comprising an emission layer arranged on the pixel electrode and an opposite electrode arranged on the emission layer.
8. A method of fabricating an Organic Light-Emitting Display (OLED), the method comprising:
providing a substrate having a circuit region and a pixel region;
respectively forming at least one circuit Thin Film Transistor (TFT) and at least one pixel TFT on the circuit region and the pixel region of the substrate, each TFT including a semiconductor layer, a gate electrode, a source electrode and a drain electrode;
forming a pixel electrode electrically connected to one of the source and drain electrodes of the at least one pixel TFT; and
forming at least one silicon nitride layer on the substrate only of the circuit region and silicon nitride layer being absent from the entire pixel region before forming the source and drain electrodes;
wherein each circuit TFT includes the source and drain electrodes directly contacting the silicon nitride layer which in turn directly contacts a silicon dioxide layer which in turn directly contacts the gate electrode; and
wherein each pixel TFT includes the source and drain electrodes directly contacting a silicon dioxide layer which in turn directly contacts the gate electrode.
9. The method according to claim 8 , further comprising forming a silicon nitride layer and a silicon dioxide layer between the gate electrode and the semiconductor layer in the circuit region, wherein the gate electrode directly contacts the silicon nitride layer which in turn directly contacts the silicon dioxide layer which in turn directly contacts the semiconductor layer; and
forming a silicon dioxide layer between the gate electrode and the semiconductor layer in the pixel region, wherein the gate electrode directly contacts the silicon dioxide layer which in turn directly contacts the semiconductor layer.
10. The method according to claim 8 , wherein the silicon nitride layer comprises one of SiNx and SiON.
11. The method according to claim 8 ,
further comprising forming a silicon nitride layer and a silicon dioxide layer between the semiconductor layer and the substrate in the circuit region, wherein the semiconductor layer directly contacts the silicon dioxide layer which in turn directly contacts the silicon nitride layer which in turn directly contacts the substrate; and
forming a silicon dioxide layer between the semiconductor layer and the substrate in the pixel region, wherein the semiconductor layer directly contacts the silicon dioxide layer which in turn directly contacts the substrate.
12. The method according to claim 8 ,
wherein the silicon nitride layer is simultaneously formed with forming source and drain contact holes in the silicon nitride layer and the silicon dioxide layer with a halftone mask.