Silicon carbide-based device contact and contact fabrication method
View Patent ↗A silicon carbide-based device contact and contact fabrication method employ a layer of poly-silicon on a SiC substrate, with the contact's metal layer deposited on top of the poly-silicon. Both Schottky and ohmic contacts can be formed. The poly-silicon layer can be continuous or patterned, and can be undoped or doped to be n-type or p-type. The present contact and method provide excellent contact adhesion, and can be employed with a number of different device types, to provide electrical contacts for Schottky diodes, pn diodes, and transistors, for example.
1. A method of forming an electrical contact which conducts the DC operating current of a device formed on a silicon carbide (SiC) substrate, comprising:
providing a SiC substrate;
depositing a layer of poly-silicon on said SiC substrate; and
depositing a layer of metal on said poly-silicon layer such that an electrical contact which conducts the DC operating current of a device formed on said SiC substrate is formed between said metal layer and said SiC substrate via said poly-silicon layer.
2. The method of claim 1 , wherein said metal layer is a Schottky barrier metal and, said electrical contact is a Schottky contact.
3. The method of claim 2 , further comprising depositing a metal layer on the surface of said SiC substrate opposite said poly-silicon layer such that said SiC substrate, poly-silicon, and metal layers form a Schottky diode.
4. The method of claim 2 , further comprising patterning said poly-silicon layer to form periodically-spaced poly-silicon on said SiC substrate such that said metal layer contacts said SiC substrate directly in the spaces between said poly-silicon features.
5. The method of claim 1 , further comprising doping said poly-silicon layer.
6. The method of claim 5 , further comprising activating said dopant in said poly-silicon layer.
7. The method of claim 1 , further comprising doping a region of said SiC substrate to be n-type or p-type material such that an ohmic contact is formed between said metal layer and said doped region via said poly-silicon layer.
8. The method of claim 7 , further comprising performing an annealing step after said metal layer is deposited.
9. The method of claim 8 , wherein said annealing step is performed at a temperature of <600° C.
10. The method of claim 7 , further comprising patterning said poly-silicon and metal layers such that they are confined to the area of said substrate directly above said doped region.
11. The method of claim 7 , further comprising doping said poly-silicon layer to have the same polarity as said SiC substrate.
12. The method of claim 7 , further comprising patterning said poly-silicon layer to form periodically-spaced poly-silicon features on said doped region such that said metal layer contacts said substrate directly in the spaces between said poly-silicon features.
13. The method of claim 7 , further comprising depositing a second layer of metal on said SiC substrate opposite said poly-silicon layer to form a SiC-based diode.
14. A method of forming an ohmic contact which conducts the DC operating current of a device formed on a silicon carbide (SiC) substrate, comprising:
providing a SiC substrate;
doping a region of said SiC substrate with an n-type or p-type dopant;
activating said n-type or p-type dopant material;
depositing a layer of poly-silicon on said SiC substrate;
depositing a layer of metal on said poly-silicon layer; and
annealing said SiC substrate such that an ohmic contact which conducts the DC operating current of a device formed on said SiC substrate is formed between said metal layer and said SiC substrate via said poly-silicon layer.
15. The method of claim 14 , further comprising doping said poly-silicon layer with a dopant to have the same polarity as said SiC substrate and activating said poly-silicon layer dopant.
16. The method of claim 14 , further comprising patterning said poly-silicon layer to form periodically-spaced poly-silicon features on the doped region of said SiC substrate such that said metal layer contacts said SiC substrate directly in the spaces between said poly-silicon features, said annealing arranged to form an ohmic contact between said metal layer and the doped region of said SiC substrate in the spaces between said periodically-spaced poly-silicon features.
17. A method of forming a Schottky contact which conducts the DC operating current of a device formed on a silicon carbide (SiC) substrate, comprising:
providing a SiC substrate;
depositing a layer of poly-silicon on said SiC substrate; and
depositing a layer of a Schottky barrier metal on said poly-silicon layer such that an electrical contact which conducts the DC operating current of a device formed on said SiC substrate is formed between said metal layer and said SiC substrate via said poly-silicon layer.
18. A method of forming an electrical contact which conducts the DC operating current of a device formed on a silicon carbide (SiC) substrate, comprising:
providing a SiC substrate;
depositing a layer of poly-silicon on said SiC substrate;
patterning said poly-silicon layer to form periodically-spaced poly-silicon features on said SiC substrate; and
depositing a layer of metal on said poly-silicon layer such that an electrical contact which conducts the DC operating current of a device formed on said SiC substrate is formed between said metal layer and said SiC substrate via said poly-silicon layer, and between said metal layer and said SiC substrate directly in the spaces between said poly-silicon features.