Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces
View Patent ↗Microfeature workpieces having microlenses and methods of forming microlenses on microfeature workpieces are disclosed herein. In one embodiment, a method for forming microlenses includes forming a plurality of shaping members on a microfeature workpiece between adjacent pixels, reflowing the shaping members to form a shaping structure between adjacent pixels, depositing lens material onto the workpiece, removing selected portions of the lens material adjacent to the shaping structure such that discrete masses of lens material are located over corresponding pixels, and heating the workpiece to reflow the discrete masses of lens material and form a plurality of microlenses.
1. A method of forming a plurality of microlenses on a microfeature workpiece having a plurality of pixels, the method comprising:
forming a plurality of shaping members on the microfeature workpiece between adjacent pixels;
reconfiguring the shaping members to form a shaping structure between adjacent pixels;
constructing discrete masses of lens material over corresponding pixels such that individual masses of lens material are separated from each other by the shaping structure; and
reflowing the discrete masses of lens material to form a plurality of microlenses.
2. The method of claim 1 wherein:
reconfiguring the shaping members comprises reflowing the shaping members; and
constructing discrete masses of lens material comprises depositing lens material onto the workpiece and removing selected portions of the lens material adjacent to the shaping structure.
3. The method of claim 2 wherein the workpiece has a surface, and wherein forming the shaping members comprises:
depositing a resist layer onto the surface of the workpiece;
patterning the resist layer; and
selectively developing the resist layer to form the shaping members on the surface.
4. The method of claim 2 wherein forming the shaping members comprises constructing a plurality of discrete shaping members having at least approximately the same height.
5. The method of claim 2 wherein forming the shaping members comprises constructing a first shaping member having a first cross-sectional area and a second shaping member having a second cross-sectional area different than the first cross-sectional area.
6. The method of claim 2 wherein forming the shaping members comprises constructing a base and a plurality of discrete shaping members projecting from the base, and wherein the base and shaping members are integral members of a shaping unit.
7. The method of claim 2 wherein the pixels comprise a first pixel and a second pixel adjacent to the first pixel, wherein forming the shaping members comprises forming first and second shaping members between the first and second pixels, and wherein the first shaping member is adjacent to the second shaping member and spaced apart from the second shaping member.
8. The method of claim 2 wherein removing selected portions of the lens material comprises etching the selected portions of the lens material.
9. The method of claim 2 wherein reflowing the shaping members comprises forming a continuous shaping structure.
10. The method of claim 2 wherein reflowing the shaping members comprises forming a shaping structure with discrete portions.
11. The method of claim 2 wherein the shaping members have a first height, and wherein depositing lens material onto the workpiece comprises placing a layer of lens material with a second height greater than the first height of the shaping members.
12. The method of claim 1 wherein reflowing the discrete masses comprises forming a plurality of microlenses having a shape based at least partially on a configuration of the shaping structure.
13. The method of claim 2 wherein the shaping structure comprises an opaque structure that is nontransmissive to selected radiation.