Centipede actuator motion stage
View Patent ↗A micro electromechanical actuator has movable flaps formed on a base plate. The flaps are detached from the base plate on the ends and along one side, with the opposite side being partially attached to the base plate by flexures. The flaps can be moved upward, rotating or twisting along the axis of the flexure so that a one side contacts a movable element first, followed by the opposite side. As a result, the movable element is moved laterally with respect to the flaps. Movement of the flaps can be by application of a voltage to the flaps, followed by removal of the voltage to return the flaps to their original position. The cycle can continue to move the movable element the desired amount.
1. A method of moving an element having a planar lower surface using a micro electro-mechanical actuator, the method comprising:
providing a planar substrate having a planar upper surface and a planar moveable flap formed therein,
suspending the element above the substrate such that the lower surface of the element is disposed parallel to the upper surface of the substrate and is spaced apart therefrom by a constant distance;
bringing a first portion of the planar movable flap into contact with the lower surface of the element; and,
bringing a second portion of the flap into contact with the lower surface of the element such that the second portion of the flap is disposed against and substantially parallel to the lower surface of the element and causes the element to move laterally relative to the substrate; wherein
the bringing of the first and second portions of the flap into contact with the surface are respectively effected through first and second electrostatic forces acting between the flap and the element, and
the field strength of the second electrostatic force is greater than that of the first electrostatic force.
2. The method of claim 1 , wherein the bringing of the first and second portions of the flap into contact with the surface comprises applying a first voltage to the flap.
3. The method of claim 2 , wherein the bringing of the first and second portions of the flap into contact with the surface further comprises applying a second voltage to the surface, the second voltage being different than the first voltage.
4. The method of claim 3 , wherein the second voltage comprises approximately 0 volts.
5. The method of claim 1 , further comprising moving the flap away from the surface.
6. The method of claim 5 , wherein the moving comprises reducing the voltage on the flap to approximately 0 volts.
7. The method of claim 5 , further comprising repeating the bringing and moving to effectuate continued movement.
8. The method of claim 5 , further comprising alternating the bringing and moving between two sets of flaps.
9. The method of claim 1 , wherein the first portion of the flap is more freely movable than the second portion.
10. The method of claim 1 , further comprising suspending the element relative to the flap such that the element is substantially constrained against all but lateral movement.
11. The method of claim 10 , wherein the suspending of the element relative to the flap comprises suspending the element by one or more flexures.