Manufacturing process of semi-conductor device
View Patent ↗Exemplary embodiments discourage or prevent impurities from mixing in a film of a semiconductor layer in a manufacturing process of a semiconductor device. A manufacturing process of a semiconductor device includes first forming a semiconductor layer, second removing hydrogen from inside the semiconductor layer, and third terminating by combining elements such as hydrogen with a surface of the semiconductor layer through exposure to hydrogen plasma and the like. At least the second removing and the third terminating are consecutively performed under an environment isolated from air. According to this process, it is possible to prevent or discourage impurities contained in air and the like from combining on the surface of the semiconductor film. It is possible to discourage or prevent impurities from mixing (diffusing) in the semiconductor layer in crystallization through irradiation by light following the third terminating.
1. A manufacturing process of a semiconductor device, comprising:
first forming a thin film semiconductor layer;
second performing dehydrogenation processing to remove hydrogen from inside the semiconductor layer;
third combining at least one of a non-inert atom and a non-inert molecule on a surface of the semiconductor layer activated by the dehydrogenation processing to terminate a connector of the surface of the semiconductor layer; and
consecutively performing at least the second performing and the third combining under an environment isolated from air.
2. The manufacturing process of the semiconductor device according to claim 1 , further comprising:
fourth performing crystallization processing by further irradiating the semiconductor layer by light for crystallization following the third combining.
3. The manufacturing process of the semiconductor device atmosphere according to claim 2 , the fourth performing including consecutively performing crystallization processing under the environment isolated from air following the third combining.
4. The manufacturing process of the semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to hydrogen plasma.
5. The manufacturing process of the semiconductor device according to claim 1 , the third combining including heating the surface of the semiconductor layer in an atmosphere containing hydrogen.
6. The manufacturing process of the semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to the atmosphere containing hydrogen.
7. The manufacturing process of the semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to oxygen plasma.
8. The manufacturing process of a semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to nitrogen plasma.
9. The manufacturing process of the semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to ammonia plasma.
10. The manufacturing process of the semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to phosphine.
11. The manufacturing process of the semiconductor device according to claim 1 , the third combining including exposing the surface of the semiconductor layer to diborane.