Method of fabricating inkjet nozzle chambers

1. A method of fabricating inkjet nozzle chambers on a substrate, each nozzle chamber comprising a roof having a nozzle aperture defined therein and sidewalls extending from the roof to the substrate, the method comprising the steps of:

(a) depositing one or more layers of sacrificial material onto the substrate;

(b) defining openings in the sacrificial material, the openings being complementary to chamber sidewalls;

(c) depositing roof material by plasma enhanced chemical vapour deposition (PECVD) onto the sacrificial material and into the openings, thereby forming the roof and sidewalls of each chamber;

(d) etching nozzle apertures through the roof; and

(e) removing the sacrificial material exposed through the nozzle apertures.

2. The method of claim 1 , which forms part of a printhead fabrication process.

3. The method of claim 1 , wherein the sacrificial material is a photosensitive material.

4. The method of claim 1 , wherein each chamber roof forms part of a nozzle plate spanning a plurality of nozzles.

5. The method of claim 1 , wherein the roof material is a glass material.

6. The method of claim 1 , wherein the roof material is silicon nitride.

7. The method of claim 1 , wherein each nozzle aperture has a respective nozzle rim.

8. The method of claim 7 , wherein nozzles rims are etched into each roof prior to etching nozzle apertures through each roof.

9. The method of claim 1 , wherein an actuator is positioned in the nozzle chamber.