Driving apparatus and exposure apparatus
A driving apparatus which drives an object. The apparatus includes an electromagnetic actuator having a movable element and a stator, a surrounding member surrounding a heat portion of the electromagnetic actuator, a beam which provides the object with a driving force in accordance with movement of the movable element, a connecting member connecting the movable element and the beam, wherein the surrounding member has an opening allowing the movement of the movable element, the opening being arranged at a portion of the surrounding member not facing the object, and a heat recovery unit arranged at a position facing the opening.
1. A driving apparatus which drives an object, the apparatus comprising:
an electromagnetic actuator having a movable element and a stator;
a surrounding member surrounding a heat portion of the electromagnetic actuator;
a beam which provides the object with a driving force in accordance with movement of the movable element;
a connecting member connecting the movable element and the beam, wherein the surrounding member has an opening allowing the movement of the movable element, the opening being arranged at a portion of the surrounding member not facing the object; and
a heat recovery unit arranged at a position facing the opening.
2. The apparatus according to claim 1 , wherein the opening is arranged at a portion of the surrounding member, which is an opposite side of the object side.
3. The apparatus according to claim 1 , wherein the opening is arranged at least in one of lower and upper portions of the surrounding member.
4. The apparatus according to claim 1 , wherein the movable element is arranged to surround the stator, and the surrounding member is arranged to surround the movable element such that the heat portion of the electromagnetic actuator is covered.
5. The apparatus according to claim 1 , wherein a position where the electromagnetic actuator applies a thrust to the connecting member substantially coincides with a barycentral position of the object.
6. The apparatus according to claim 1 , wherein the object includes a stage.
7. An exposure apparatus which transfers or draws a pattern on a substrate, said apparatus comprising:
a driving apparatus according to claim 1 as an apparatus that drives the substrate.
8. An exposure apparatus which transfers a pattern of an original onto a substrate, said apparatus comprising:
a driving apparatus according to claim 1 as an apparatus that drives one of the substrate and the original.
9. A device manufacturing method which comprises:
a step of exposing a substrate coated with a photosensitive agent by using an exposure apparatus according to claim 7 , and
a step of developing the substrate.
10. A device manufacturing method which comprises:
a step of exposing a substrate coated with a photosensitive agent by using an exposure apparatus according to claim 8 , and
a step of developing the substrate.
11. A driving apparatus which drives an object, the apparatus comprising:
an electromagnetic actuator having a movable element and a stator, the movable element being arranged to surround the stator;
a surrounding member surrounding the movable element such that a heat portion of the electromagnetic actuator is covered;
a beam which provides the object with a driving force in accordance with movement of the movable element; and
a connecting member connecting the movable element and the beam, and surrounding the surrounding member,
wherein the surrounding member has an opening allowing the movement of the movable element, the opening being arranged at a portion of the surrounding member not facing the object.