Semiconductor device and method for manufacturing the same
View Patent ↗A semiconductor device is composed of a semiconductor chip, aluminum pads formed on the semiconductor chip, alloy ball bumps, which are formed on the aluminum pads, containing gold and Pd, and gold wires, which are connected to the alloy ball bumps, having a surface made of gold. The alloy ball bumps may be composition containing gold not less than 98 mass % to not more than 99.5 mass % and palladium not less than 0.5 mass % to not more than 2 mass %. The semiconductor device having above configuration is excellent in long-term reliability.
1. A semiconductor device comprising:
a semiconductor element;
an electrode pad formed on said semiconductor element;
a metal bump formed on said electrode pad, and comprising an alloy including gold and palladium;
a conductive wire having a gold surface which is bonded to said metal bump; and
a second metal bump connected at an end portion of said conductive wire, and containing gold and palladium.
2. The semiconductor device according to claim 1 , wherein said metal bump contains gold in a range of approximately 98 mass % to 99.5 mass %, and palladium in a range of approximately 0.5 mass % to 2 mass %.
3. The semiconductor device according to claim 1 , wherein said electrode pad contains aluminum.
4. The semiconductor device according to claim 1 , wherein said conductive wire comprises a gold wire.
5. The semiconductor device according to claim 1 , wherein said conductive wire is a conductive wire on a Tape Automated Bonding (TAB) tape.
6. The semiconductor device according to claim 1 , further comprising:
a resin sealing body sealing said semiconductor element, said electrode pad, said metal bump and said conductive wire.
7. The semiconductor device according to claim 1 , further comprising:
a lead wire,
wherein said second metal bump is formed on an end portion of said lead wire.
8. The semiconductor device according to claim 7 , wherein said end portion of the lead wire contains aluminum.
9. The semiconductor device according to claim 7 , wherein said resin sealing body seals said end portion of said lead wire and said second metal bump.
10. The semiconductor device according to claim 4 , further comprising:
a bond formed between said gold wire and said metal bump.
11. The semiconductor device according to claim 1 , further comprising:
a palladium rich region formed in a bonding region between said metal bump and said conductive wire.
12. The semiconductor device according to claim 11 , wherein said palladium rich region suppresses a diffusion of gold in said metal bump across said bonding region.
13. A method for manufacturing a semiconductor device, comprising:
forming an electrode pad on a semiconductor element;
forming a metal bump comprising an alloy including gold and palladium on said electrode pad;
bonding a conductive wire having a gold surface at a first end to said metal bump; and
connecting said conductive wire at a second end to a second metal bump containing gold and palladium.
14. The method for manufacturing the semiconductor device according to claim 13 , wherein said connecting said conductive wire includes performing wire bonding of a gold wire.
15. The method for manufacturing the semiconductor device according to claim 13 , wherein said connecting said conductive wire includes performing TAB bonding of conductive wire on a Tape Automated Bonding (TAB) tape.
16. The method for manufacturing the semiconductor device according to claim 13 , further comprising:
sealing said semiconductor element, said electrode pad, said metal bump and said conductive wire with a resin sealing body.
17. The method for manufacturing the semiconductor device according to claim 13 , further comprising:
forming said second metal bump on an end portion of a lead wire.
18. The method for manufacturing the semiconductor device according to claim 16 , wherein said sealing further seals said end portion of said lead wire and said second metal bump with said resin sealing body.
19. An electrical connection apparatus for a semiconductor device comprising:
a metal bump comprising an alloy including gold and palladium;
a conductive wire having a gold surface bonded at a first end to said metal bump; and
a second metal bump comprising an alloy including gold and palladium bonded at a second end of said conductive wire.
20. The electrical connection apparatus of claim 19 , wherein said first and second metal bumps contain gold in a range of approximately 98 mass % to 99.5 mass %, and palladium in a range of approximately 0.5 mass % to 2 mass %.
21. The electrical connection apparatus of claim 19 , further comprises:
an electrical connection containing aluminum,
wherein at least one of said first and said second metal bumps is formed on said electrical connection.
22. The electrical connection apparatus of claim 21 , wherein said electrical connection comprises one of an electrode pad formed on a semiconductor element and a lead wire.
23. The electrical connection apparatus of claim 19 , wherein said conductive wire comprises one of a gold wire and a conductive wire on a Tape Automated Bonding (TAB) tape.