Semiconductor device
View Patent ↗A semiconductor device is composed at least of a memory circuit part having capacitors and a peripheral circuit part for controlling the memory circuit part and has a first hydrogen barrier film of hydrogen resistance covering a region in which the capacitors are formed and a second hydrogen barrier film of hydrogen resistance covering at least the memory circuit part and the peripheral circuit part above the first hydrogen barrier film. The second hydrogen barrier film covers a region of the semiconductor device located between an interconnect layer above the first hydrogen barrier film and closest to the capacitors and the first hydrogen barrier film except for a region thereof in which a contact plug is formed.
1. A semiconductor device composed at least of a memory circuit part having capacitors and a peripheral circuit part for controlling the memory circuit part, said semiconductor device comprising:
a first hydrogen barrier film of hydrogen resistance covering a region in which the capacitors are formed; and
a second hydrogen barrier film of hydrogen resistance covering at least the memory circuit part and the peripheral circuit part above the first hydrogen barrier film,
wherein the second hydrogen barrier film covers a region of the semiconductor device located between an interconnect layer above the first hydrogen barrier film and closest to the capacitors and the first hydrogen barrier film except for a region thereof in which a contact plug is formed, and
the first hydrogen barrier film is formed to cover all sides of a region in which the capacitors are formed from above, below and around the region in which the capacitors are formed.
2. The semiconductor device of claim 1 , wherein
the first hydrogen barrier film is formed such that barrier films having different compositions are joined at the lateral sides of the region in which the capacitors are formed.
3. The semiconductor device of claim 1 , further comprising:
an interlayer insulating film which covers the first hydrogen barrier film and through which the contact plug passes; and
a third hydrogen barrier film of hydrogen resistance formed on the side surface of the contact plug,
wherein the second hydrogen barrier film is formed on the interlayer insulating film, and
the third hydrogen barrier film makes contact with the second hydrogen barrier film on the upper end of each said contact plug.
4. The semiconductor device of claim 3 , further comprising
a fourth hydrogen barrier film of hydrogen resistance formed below the capacitors.
5. The semiconductor device of claim 4 , wherein
the fourth hydrogen barrier film makes contact with the third hydrogen barrier film.
6. The semiconductor device of claim 3 , wherein
the third hydrogen barrier film is composed of titanium aluminum, titanium aluminum nitride or a multilayer film of them.
7. The semiconductor device of claim 3 , wherein
the third hydrogen barrier film is composed of silicon nitride, silicon oxynitride, aluminum oxide, titanium aluminum oxide, tantalum aluminum oxide, titanium-silicon oxide, or tantalum-silicon oxide.
8. The semiconductor device of claim 1 , wherein
the interconnect layer includes a conductive material of hydrogen resistance, said conductive material being formed on the second hydrogen barrier film so as to be connected to the contact plug.
9. The semiconductor device of claim 8 , wherein
the conductive material is composed of titanium aluminum, titanium aluminum nitride or a multilayered film of them.
10. The semiconductor device of claim 1 further comprising
an interlayer insulating film which covers the first hydrogen barrier film and through which the contact plug passes through,
wherein the second hydrogen barrier film is formed on the interlayer insulating film, the top surface of said interlayer insulating film being planarized.
11. The semiconductor device of claim 1 , wherein
the second hydrogen barrier film is made of silicon nitride, silicon oxynitride, aluminum oxide, titanium aluminum oxide, tantalum aluminum oxide, titanium-silicon oxide, or tantalum-silicon oxide.
12. The semiconductor device of claim 1 , wherein
the semiconductor device is formed on a semiconductor chip, and the second hydrogen barrier film is formed to cover the entire area of the semiconductor chip.
13. The semiconductor device of claim 1 , wherein
the capacitor has a capacitive insulating film made of a ferroelectric material or a high-dielectric-constant material.
14. A semiconductor device composed at least of a memory circuit part having capacitors and a peripheral circuit part for controlling the memory circuit part, said semiconductor device comprising:
a first hydrogen barrier film of hydrogen resistance covering a region in which the capacitors are formed; and
a second hydrogen barrier film of hydrogen resistance covering at least the memory circuit part and the peripheral circuit part above the first hydrogen barrier film,
wherein the second hydrogen barrier film covers a region of the semiconductor device located between an interconnect layer above the first hydrogen barrier film and closest to the capacitors and the first hydrogen barrier film except for a region thereof in which a contact plug is formed,
the first hydrogen barrier film is formed to cover all sides of a region in which the capacitors are formed from above, below and around the region in which the capacitors are formed, and
the first hydrogen barrier film is formed such that barrier films having different compositions are joined at the lateral sides of the region in which the capacitors are formed.
15. The semiconductor device of claim 14 , wherein
the interconnect layer includes a conductive material of hydrogen resistance, said conductive material being formed on the second hydrogen barrier film so as to be connected to the contact plug.
16. The semiconductor device of claim 15 , wherein
the conductive material is composed of titanium aluminum, titanium aluminum nitride or a multilayered film of the foregoing materials.
17. The semiconductor device of claim 14 further comprising
an interlayer insulating film which covers the first hydrogen barrier film and through which the contact plug passes through,
wherein the second hydrogen barrier film is formed on the interlayer insulating film, the top surface of said interlayer insulating film being planarized.
18. The semiconductor device of claim 14 , wherein
the second hydrogen barrier film is made of silicon nitride, silicon oxynitride, aluminum oxide, titanium aluminum oxide, tantalum aluminum oxide, titanium-silicon oxide, or tantalum-silicon oxide.
19. The semiconductor device of claim 14 , wherein
the semiconductor device is formed on a semiconductor chip, and the second hydrogen barrier film is formed to cover the entire area of the semiconductor chip.
20. The semiconductor device of claim 14 , wherein
the capacitor has a capacitive insulating film made of a ferroelectric material or a high-dielectric-constant material.
21. A semiconductor device composed at least of a memory circuit part having capacitors and a peripheral circuit part for controlling the memory circuit part, said semiconductor device comprising:
a first hydrogen barrier film of hydrogen resistance covering a region in which the capacitors are formed; and
a second hydrogen barrier film of hydrogen resistance covering at least the memory circuit part and the peripheral circuit part above the first hydrogen barrier film,
an interlayer insulating film which covers the first hydrogen barrier film and through which the contact plug passes;
a third hydrogen barrier film of hydrogen resistance formed on the side surface of the contact plug; and
a fourth hydrogen barrier film of hydrogen resistance formed below the capacitors,
wherein the second hydrogen barrier film covers a region of the semiconductor device located between an interconnect layer above the first hydrogen barrier film and closest to the capacitors and the first hydrogen barrier film except for a region thereof in which a contact plug is formed,
the second hydrogen barrier film is formed on the interlayer insulating film,
the third hydrogen barrier film makes contact with the second hydrogen barrier film on the upper end of each said contact plug, and
the fourth hydrogen barrier film makes contact with the third hydrogen barrier film.
22. The semiconductor device of claim 21 , wherein
the third hydrogen barrier film is composed of titanium aluminum, titanium aluminum nitride or a multilayer film of them.
23. The semiconductor device of claim 21 , wherein
the third hydrogen barrier film is composed of silicon nitride, silicon oxynitride, aluminum oxide, titanium aluminum oxide, tantalum aluminum oxide, titanium-silicon oxide, or tantalum-silicon oxide.
24. The semiconductor device of claim 21 , wherein
the interconnect layer includes a conductive material of hydrogen resistance, said conductive material being formed on the second hydrogen barrier film so as to be connected to the contact plug.
25. The semiconductor device of claim 24 , wherein
the conductive material is composed of titanium aluminum, titanium aluminum nitride or a multilayered film of the foregoing materials.
26. The semiconductor device of claim 21 further comprising
an interlayer insulating film which covers the first hydrogen barrier film and through which the contact plug passes through,
wherein the second hydrogen barrier film is formed on the interlayer insulating film, the top surface of said interlayer insulating film being planarized.
27. The semiconductor device of claim 21 , wherein
the second hydrogen barrier film is made of silicon nitride, silicon oxynitride, aluminum oxide, titanium aluminum oxide, tantalum aluminum oxide, titanium-silicon oxide, or tantalum-silicon oxide.
28. The semiconductor device of claim 21 , wherein
the semiconductor device is formed on a semiconductor chip, and the second hydrogen barrier film is formed to cover the entire area of the semiconductor chip.
29. The semiconductor device of claim 21 , wherein
the capacitor has a capacitive insulating film made of a ferroelectric material or a high-dielectric-constant material.