Method for preparing a structure with high aspect ratio
View Patent ↗The present invention discloses a method for preparing a structure with high aspect ratio, which can be a trench or a conductor. A first mask is formed on a substrate, and a first etching process is performed to remove the substrate uncovered by the first mask to form at least one concavity. A second mask is formed on the surface of the prepared structure, a second etching process is then performed to remove the second mask on the concavity, and a third etching process is performed subsequently to extend the depth of the concavity into the substrate. To prepare a conductor with high aspect ratio in the substrate, the first mask and the second mask are preferably made of dielectric material or metal. In addition, to prepare a trench with high aspect ratio in a silicon substrate, the first mask and the second mask are preferably made of dielectric material.
1. A method for preparing a structure with high aspect ratio, comprising steps of:
depositing a first layer made of dielectric material or metal by a chemical vapor deposition process on a conductive layer of a substrate;
forming at least one photoresist pattern on the first layer;
etching the first layer to form a first mask on the substrate;
performing a first etching process to remove a portion of the substrate uncovered by the first mask to form at least one concavity;
forming a second mask on the first mask by a process comprising at least a step of depositing a second layer on the substrate and a step of removing a portion of the second layer on the surface of the at least one concavity, wherein the step of removing a portion of the second layer on the surface of the at least one concavity is a dry etching process using etching gases including octafluorocyclopentene, argon, carbon tetrafluoride and oxygen; and
performing a second etching process to extend the depth of the at least one concavity into the substrate.
2. The method for preparing a structure with high aspect ratio of claim 1 , wherein the etching selectivity of the first etching process between the conductive layer and the first layer is greater than three.
3. The method for preparing a structure with high aspect ratio of claim 1 , wherein the dielectric material is tetraethoxysilane.
4. The method for preparing a structure with high aspect ratio of claim 1 , wherein the conductive layer is an aluminum layer, and the metal is tungsten.
5. The method for preparing a structure with high aspect ratio of claim 1 , wherein the conductive layer comprises aluminum, and the first etching process is a dry etching process using etching gases including methane, chlorine, boron trichloride, argon and oxygen.
6. The method for preparing a structure with high aspect ratio of claim 1 , wherein the etching selectivity of the second etching process between the conductive layer and the second layer is greater than three.
7. The method for preparing a structure with high aspect ratio of claim 1 , wherein the step of depositing the second layer on the substrate is a plasma enhanced chemical vapor deposition process.
8. The method for preparing a structure with high aspect ratio of claim 1 , wherein the second layer is made of dielectric material or metal.
9. The method for preparing a structure with high aspect ratio of claim 1 , wherein the step of depositing the second layer on the substrate is a chemical vapor deposition process for tungsten.
10. The method for preparing a structure with high aspect ratio of claim 1 , wherein the step of forming the second mask on the first mask comprises:
depositing a second dielectric layer on the substrate; and
removing a portion of the second dielectric layer on the surface of the concavity to form the second mask.
11. The method for preparing a structure with high aspect ratio of claim 10 , wherein the step of depositing the second dielectric layer on the substrate is a plasma enhanced chemical vapor deposition process.