Printhead nozzle arrangement with a micro-electromechanical shape memory alloy based actuator
View Patent ↗A printhead nozzle arrangement includes a substrate. Drive circuitry is positioned on the substrate. A nozzle chamber structure is arranged on the substrate and defines a nozzle chamber in fluid communication with a supply of ink and an ink ejection port in fluid communication with the nozzle chamber. An actuator is connected to the drive circuitry and is operatively positioned with respect to the nozzle chamber. The actuator is reciprocally deformable between a quiescent condition and an active condition to eject ink from the ink ejection port. At least a portion of the actuator is in the form of a shape memory alloy which is in a pre-stressed martensitic phase when the actuator is in the quiescent condition and in an austenitic phase when the actuator is in the active condition so that cyclic phase changes generate the reciprocal movement.
1. A printhead nozzle arrangement which comprises
a substrate;
drive circuitry positioned on the substrate;
a nozzle chamber structure arranged on the substrate, defining a nozzle chamber in fluid communication with a supply of ink and an ink ejection port in fluid communication with the nozzle chamber; and
an actuator that is connected to the drive circuitry and is operatively positioned with respect to the nozzle chamber, the actuator being reciprocally deformable between a quiescent condition and an active condition to eject ink from the ink ejection port,
wherein the actuator comprises a shape memory alloy sandwiched between a first structural layer and a second structural layer, the second structural layer being mechanically locked to the first structural layer to provide a stress reference for the first structural layer, and wherein the shape memory alloy is in a pre-stressed martensitic phase when the actuator is in the quiescent condition and in an austenitic phase when the actuator is in the active condition, such that cyclic phase changes generate said reciprocal movement.
2. A printhead nozzle arrangement as claimed in claim 1 , in which the nozzle chamber structure is defined by an etched passage through the substrate, and an etch stop layer that defines the ink ejection port.
3. A printhead nozzle arrangement as claimed in claim 2 , in which the substrate is of silicon, while the etch stop layer is a boron-doped epitaxial layer.
4. A printhead nozzle arrangement as claimed in claim 2 , in which the actuator is positioned on the substrate, opposite the ink ejection port, the actuator being bent away from the ink ejection port in the quiescent condition and straightened towards the ink ejection port in the active condition.
5. A printhead nozzle arrangement as claimed in claim 4 , in which the shape memory alloy defines a heating circuit of the actuator, the heating circuit having a substantially flat martensitic phase and being connected to the drive circuitry to receive an electrical heating signal from the drive circuitry, and a first structural layer that is positioned on the heating circuit, the first structural layer being the result of a high-temperature deposition so that, subsequent to cooling, the first structural layer and the heating circuit bent into the quiescent condition with the heating circuit in the martensitic phase.
6. A printhead nozzle arrangement as claimed in claim 1 , in which the first structural layer is silicon nitride, the shape memory alloy is a nickel titanium alloy and the second structural layer is silicon oxide.