Method and device for removing dust from surface of support
According to the method of the present invention, the clean gas is supplied between the support and the plate-like body to form the pressurized space, thereby preventing the surface of the support from being exposed to dust and allowing a conveyance path to be maintained at desired cleanliness. Specifically, the pressurized space between the support and the plate-like body is at the atmospheric pressure or higher, thereby preventing dust from being introduced.
1 . A method for removing dust from a surface of a support, comprising the steps of:
placing a plate-like body on a surface of a traveling band-like support so as to face the surface at a predetermined distance;
supplying a gas with cleanliness of class 10 or less between the support and the plate-like body; and
forming a pressurized space at atmospheric pressure or higher between the support and the plate-like body.
2 . The method for removing dust from a surface of a support according to claim 1 , wherein
a width of the plate-like body is equal to or larger than a width of the support;
a slit is formed in the plate-like body in a traveling direction of the support; and
the gas with the cleanliness of class 10 or less is supplied through the slit.
3 . The method for removing dust from a surface of a support according to claim 1 , wherein
a width of the plate-like body is equal to or larger than a width of the support;
a slit is formed in the plate-like body perpendicularly to a traveling direction of the support; and
the gas with the cleanliness of class 10 or less is supplied through the slit.
4 . The method for removing dust from a surface of a support according to claim 1 , wherein
a width of the plate-like body is equal to or larger than a width of the support;
multiple air supply holes are formed in the plate-like body; and
the gas with the cleanliness of class 10 or less is supplied through the air supply holes.
5 . The method for removing dust from a surface of a support according to claim 1 , wherein
a width of the plate-like body is equal to or larger than a width of the support;
a surface of the plate-like body is formed of a permeable member; and
the gas with the cleanliness of class 10 or less is supplied through the permeable member.
6 . The method for removing dust from a surface of a support according to claim 1 , wherein the pressurized space at atmospheric pressure or higher is formed between a coating side surface of the support and the plate-like body before and/or after a coating film with a thickness at coating of 10 μm or less is formed on the surface of the support by a coating device.
7 . The method for removing dust from a surface of a support according to claim 2 , wherein the pressurized space at atmospheric pressure or higher is formed between a coating side surface of the support and the plate-like body before and/or after a coating film with a thickness at coating of 10 μm or less is formed on the surface of the support by a coating device.
8 . The method for removing dust from a surface of a support according to claim 3 , wherein the pressurized space at atmospheric pressure or higher is formed between a coating side surface of the support and the plate-like body before and/or after a coating film with a thickness at coating of 10 μm or less is formed on the surface of the support by a coating device.
9 . The method for removing dust from a surface of a support according to claim 4 , wherein the pressurized space at atmospheric pressure or higher is formed between a coating side surface of the support and the plate-like body before and/or after a coating film with a thickness at coating of 10 μm or less is formed on the surface of the support by a coating device.
10 . The method for removing dust from a surface of a support according to claim 5 , wherein the pressurized space at atmospheric pressure or higher is formed between a coating side surface of the support and the plate-like body before and/or after a coating film with a thickness at coating of 10 μm or less is formed on the surface of the support by a coating device.
11 . The method for removing dust from a surface of a support according to claim 1 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
12 . The method for removing dust from a surface of a support according to claim 2 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
13 . The method for removing dust from a surface of a support according to claim 3 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
14 . The method for removing dust from a surface of a support according to claim 4 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
15 . The method for removing dust from a surface of a support according to claim 5 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
16 . The method for removing dust from a surface of a support according to claim 6 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
17 . The method for removing dust from a surface of a support according to claim 7 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
18 . The method for removing dust from a surface of a support according to claim 8 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
19 . The method for removing dust from a surface of a support according to claim 9 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
20 . The method for removing dust from a surface of a support according to claim 10 , wherein the pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body after the surface of the support is cleaned.
21 . A device for removing dust from a surface of a support, comprising:
a support conveying device which causes a band-like support to travel;
a plate-like body placed on a surface of the traveling support so as to face the surface at a predetermined distance; and
a gas supply device which supplies a gas with cleanliness of class 10 or less between the support and the plate-like body,
wherein a pressurized space at atmospheric pressure or higher is formed between the support and the plate-like body.