Method of fabricating semiconductor device and semiconductor fabricated by the same method
View Patent ↗A semiconductor device and method of fabricating the same are provided. The method includes: depositing a silicon layer containing amorphous silicon on a substrate; defining source and drain regions by doping the silicon layer with impurity ions; crystallizing the amorphous silicon by an annealing process under an atmosphere of H 2 O at a predetermined temperature, and at the same time activating the impurity ions to form a semiconductor layer; forming a gate insulating layer over the entire surface of the substrate having the semiconductor layer; and forming a gate electrode on the gate insulating layer in correspondence with a channel region of the semiconductor layer, in which the annealing process is simplified by crystallizing the polycrystalline silicon and at the same time activating the impurity ions, thereby preventing the substrate from being deformed due to high temperature during the annealing process.
1. A method of fabricating a semiconductor device, comprising:
depositing a silicon layer comprising undoped amorphous silicon on a substrate;
defining regions to be formed into source and drain regions by selectively doping the silicon layer with doping impurity ions;
performing a Solid Phase Crystallization (SPC) of the amorphous silicon and, at the same time, activating the doping impurity ions by a high temperature annealing process under an atmosphere of H 2 O at a predetermined temperature to form a semiconductor layer having the source and drain regions contained therein, the predetermined temperature ranging from 550° C. to 750° C.;
forming a gate insulating layer over an entire surface of the substrate having the semiconductor layer; and
forming a gate electrode on the gate insulating layer in correspondence with a channel region of the semiconductor layer.
2. The method according to claim 1 , wherein the predetermined temperature ranges from 600° C. to 710° C.
3. The method according to claim 1 , wherein the H 2 O pressure ranges from 10,000 Pa to 2 Mpa.
4. The method according to claim 1 , wherein the silicon layer has a thickness of 2,000 Å or less.
5. The method according to claim 4 , wherein the silicon layer has a thickness of 300 Å to 1,000 Å.
6. The method according to claim 1 , further comprising annealing the silicon layer once more by heating in a furnace or by performing an Excimer Laser Annealing (ELA) process after the annealing process.
7. The method according to claim 1 , further comprising patterning the semiconductor layer before crystallizing the semiconductor layer.
8. The method according to claim 1 , further comprising patterning the semiconductor layer after crystallizing the semiconductor layer.
9. A method of fabricating a semiconductor device, comprising:
forming a gate electrode on a substrate;
forming a gate insulating layer over an entire surface of the substrate having the gate electrode;
depositing a silicon layer containing amorphous silicon on the gate insulating layer;
defining regions to be formed into source and drain regions by selectively doping the silicon layer with doping impurity ions using a photoresist; and
removing the photoresist and then both performing a Solid Phase Crystallization (SPC) of the amorphous silicon and, at the same time, activating the doping impurity ions by a high temperature annealing process under an atmosphere of H 2 O at a predetermined temperature to form a semiconductor layer having the source and drain regions contained therein, the predetermined temperature ranging from 550° C. to 750° C.
10. The method according to claim 9 , wherein the predetermined temperature ranges from 600° C. to 710° C.
11. The method according to claim 9 , wherein the H 2 O pressure ranges from 10,000 Pa to 2 Mpa.
12. The method according to claim 9 , wherein the silicon layer has a thickness of 2,000 Å or less.
13. The method according to claim 12 , wherein the silicon layer has a thickness of 300 Å to 1,000 Å.
14. The method according to claim 9 , further comprising annealing the silicon layer once more by heating in a furnace or performing an Excimer Laser Annealing (ELA) process after the annealing process.
15. A semiconductor device fabricated by the method according to claim 1 , comprising P-type or N-type thin film transistors.
16. A semiconductor device fabricated by the method according to claim 9 , comprising P-type or N-type thin film transistors.
17. The semiconductor device according to claim 15 , wherein the semiconductor device is used for an organic light emitting display or a liquid crystal display.
18. The semiconductor device according to claim 16 , wherein the semiconductor device is used for an organic light emitting display or a liquid crystal display.
19. The method according to claim 1 , wherein the high temperature annealing process comprises a Rapid Thermal Annealing (RTA) process.
20. The method according to claim 9 , wherein the high temperature annealing process comprises a Rapid Thermal Annealing (RTA) process.