Method of fabricating a printhead having isolated nozzles
View Patent ↗A method of fabricating a printhead having isolated nozzles is provided. The method comprises the steps of: (a) providing a substrate, the substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate; (b) depositing a layer of photoresist over the ink ejection surface; (c) defining recesses in the photoresist, each recess revealing a portion of the ink ejection surface surrounding a respective nozzle aperture; (d) depositing a roof material over the photoresist and into the recesses; (e) etching the roof material to define a nozzle enclosure around each nozzle aperture, each nozzle enclosure having an opening defined in a roof and sidewalls extending from the roof to the ink ejection surface; and (f) removing the photoresist.
1. A method of fabricating a printhead having isolated nozzles, the method comprising the steps of:
(a) providing a substrate, the substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate;
(b) depositing a layer of photoresist over the ink ejection surface;
(c) defining recesses in the photoresist, each recess revealing a portion of the ink ejection surface surrounding a respective nozzle aperture;
(d) depositing a roof material over the photoresist and into the recesses;
(e) etching the roof material to define a nozzle enclosure around each nozzle aperture, each nozzle enclosure having an opening defined in a roof and sidewalls extending from the roof to the ink ejection surface; and
(f) removing the photoresist.
2. The method of claim 1 , wherein the photoresist is UV cured and/or hardbaked prior to deposition of the roof material.
3. The method of claim 1 , wherein the recessed features are defined by exposure and development techniques.
4. The method of claim 1 , wherein the roof material is deposited by plasma enhanced chemical vapour deposition (PECVD).
5. The method of claim 1 , wherein the roof material is coated with a hydrophobic material after deposition.
6. The method of claim 1 , wherein the printhead is a pagewidth inkjet printhead.
7. The method of claim 1 , wherein the printhead has a nozzle density sufficient to print at up to 1600 dpi.
8. A printhead, fabricated using the method of claim 1 , comprising:
a substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate; and
a plurality of formations on the ink ejection surface, the surface formations being configured to isolate each nozzle from at least one adjacent nozzle.
9. A method of printing from a printhead, fabricated using the method of claim 1 , whilst minimizing cross-contamination of ink between adjacent nozzles, the method comprising the steps of:
(a) providing a printhead comprising:
a substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate; and
a plurality of formations on the ink ejection surface, the surface formations being configured to isolate each nozzle from at least one adjacent nozzle; and
(b) printing onto a print medium using said printhead.