IP Library Granted Patent US 7,334,875
Granted Patent B2
US 7,334,875 · App. 11/084,238 · Granted Feb 26, 2008

Method of fabricating a printhead having isolated nozzles

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Quick Facts
Patent No.
US 7,334,875
App. No.
11/084,238
Granted
Feb 26, 2008
Kind
B2
Abstract

A method of fabricating a printhead having isolated nozzles is provided. The method comprises the steps of: (a) providing a substrate, the substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate; (b) depositing a layer of photoresist over the ink ejection surface; (c) defining recesses in the photoresist, each recess revealing a portion of the ink ejection surface surrounding a respective nozzle aperture; (d) depositing a roof material over the photoresist and into the recesses; (e) etching the roof material to define a nozzle enclosure around each nozzle aperture, each nozzle enclosure having an opening defined in a roof and sidewalls extending from the roof to the ink ejection surface; and (f) removing the photoresist.

Claims (21)

1. A method of fabricating a printhead having isolated nozzles, the method comprising the steps of:

(a) providing a substrate, the substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate;

(b) depositing a layer of photoresist over the ink ejection surface;

(c) defining recesses in the photoresist, each recess revealing a portion of the ink ejection surface surrounding a respective nozzle aperture;

(d) depositing a roof material over the photoresist and into the recesses;

(e) etching the roof material to define a nozzle enclosure around each nozzle aperture, each nozzle enclosure having an opening defined in a roof and sidewalls extending from the roof to the ink ejection surface; and

(f) removing the photoresist.

2. The method of claim 1 , wherein the photoresist is UV cured and/or hardbaked prior to deposition of the roof material.

3. The method of claim 1 , wherein the recessed features are defined by exposure and development techniques.

4. The method of claim 1 , wherein the roof material is deposited by plasma enhanced chemical vapour deposition (PECVD).

5. The method of claim 1 , wherein the roof material is coated with a hydrophobic material after deposition.

6. The method of claim 1 , wherein the printhead is a pagewidth inkjet printhead.

7. The method of claim 1 , wherein the printhead has a nozzle density sufficient to print at up to 1600 dpi.

8. A printhead, fabricated using the method of claim 1 , comprising:

a substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate; and

a plurality of formations on the ink ejection surface, the surface formations being configured to isolate each nozzle from at least one adjacent nozzle.

9. A method of printing from a printhead, fabricated using the method of claim 1 , whilst minimizing cross-contamination of ink between adjacent nozzles, the method comprising the steps of:

(a) providing a printhead comprising:

a substrate including a plurality of nozzles for ejecting ink droplets onto a print medium, each nozzle having a nozzle aperture defined in an ink ejection surface of the substrate; and

a plurality of formations on the ink ejection surface, the surface formations being configured to isolate each nozzle from at least one adjacent nozzle; and

(b) printing onto a print medium using said printhead.

Assignments (2)
CHANGE OF NAME Recorded Jun 25, 2014
From: ZAMTEC LIMITED
To: MEMJET TECHNOLOGY LIMITED
Reel/Frame 033244/0276 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 16, 2012
From: SILVERBROOK RESEARCH PTY. LIMITED AND CLAMATE PTY LIMITED
To: ZAMTEC LIMITED
Reel/Frame 028559/0697 →