Display device with improved moisture prevention and production method for the same
View Patent ↗A display device and a production method for the display device having a pixel region formed by arraying a plurality of pixels each having an organic layer held by a lower electrode and an upper electrode on a substrate are provided. The production method for the display device of the invention includes, in one embodiment, a first step of forming a first insulating film on the substrate, a second step of forming a plurality of such lower electrodes each corresponding to each of the pixels on the first insulating film in the pixel region, forming a conductive film on the first insulating film in a peripheral region outside the pixel region, and forming a hole, in the conductive film, which extends to the first insulating film, and a third step of performing a bake treatment on the substrate on which the lower electrode and the conductive film are provided.
1. A method for making a display device having a pixel region including a plurality of pixels each of which has an organic light emitting device provided on a substrate, the method comprising the steps of:
a first step of forming a first insulating film on the substrate;
a second step of (1) forming on the first insulating film in the pixel region, a plurality of lower electrodes respectively corresponding to each of the pixels, (2) forming a conductive film on the first insulating film outside the pixel region, and (3) making a plurality of rectangular holes at substantially even intervals over the entire area of the conductive film which extend through the conductive film to expose the surface of the first insulating film;
a third step of baking the substrate on which the lower electrode and the conductive film are provided so that moisture contained in the first insulating film is released and eliminated from the first insulating film through the plurality of holes,
wherein,
the conductive film surrounds the pixel region in plan view and is connected to an upper electrode to create an auxiliary wiring.
2. The method for making a display device as set forth in claim 1 , wherein the lower electrode and the conductive film are formed of the same material.
3. The method for making a display device as set forth in claim 1 , comprising the further steps of:
between the second step and the third step, a step of forming a second insulating film on the first insulating film to cover the lower electrodes and the conductive film, forming a pixel opening on the second insulating film to expose a surface of each of the lower electrodes, and exposing a surface of the conductive film by removing the second insulating film on the conductive film and,
after the third step, a step of forming an organic layer on the lower electrode, and a step of forming an upper electrode covering the organic layer, the second insulating film and the conductive film, thereby allowing the upper electrode and the conductive film to be connected to each other.
4. The method for making a display device as set forth in claim 3 , wherein, in the step of exposing the surface of the conductive film, the second insulating film on the conductive film is removed leaving a part of the second insulating film on the end portion of the conductive film.
5. A display device, which has a pixel region including a plurality of pixels each of which has an organic light emitting device provided on a substrate, the device comprising:
a first insulating film provided on the substrate;
a plurality of lower electrodes respectively corresponding to each of the pixels provided on the first insulating film in the pixel region;
a conductive film provided on the first insulating film outside the pixel region; and
a plurality of rectangular holes are formed at substantially even intervals over the entire area of the conductive film in the conductive film and which extend through the conductive film and expose the surface of the first insulating film,
wherein,
the conductive film surrounds the pixel region in plan view and is connected to an upper electrode to create an auxiliary wiring.
6. The display device as set forth in claim 5 , wherein the lower electrode and the conductive film are made of the same material.
7. The display device as set forth in claim 5 , further comprising:
a second insulating film provided on the first insulating film, in which second insulating film a pixel opening for allowing each of such lower electrodes to be exposed is provided;
an organic layer provided on the lower electrode; and
an upper electrode covering the organic layer, the second insulating film and the conductive film,
wherein,
the upper electrode and the conductive film are connected to each other.
8. The display device as set forth in claim 7 , wherein an end portion of the conductive film is covered by the second insulating film.
9. A method for making a display device, which has a pixel region formed by arraying a plurality of pixels, each having an organic layer held in between a lower electrode and an upper electrode on a substrate, the method comprising:
a first step of forming a plurality of the lower electrodes each corresponding to each of the pixels on the substrate;
a second step of (1) forming a first insulating film on the substrate to cover the lower electrodes, and (2) forming pixel openings in the first insulating film to expose a surface of each of the lower electrodes;
a third step of forming a conductive film on the first insulating film outside the pixel region and forming a plurality of rectangular holes at substantially even intervals over the entire area of the conductive film and which extend through the conductive film to expose the surface of the first insulating film; and
a fourth step of baking the substrate provided with the conductive film so that moisture contained in the first insulating film is released and eliminated from the first insulating film through the plurality of holes,
wherein,
the conductive film surrounds the pixel region in plan view and is connected to an upper electrode to create an auxiliary wiring.
10. The method for making a display device as set forth in claim 9 , wherein, after the fourth step, an organic layer is formed on the lower electrode, and an upper electrode is formed covering the organic layer, the first insulating film and the conductive film, thereby allowing the upper electrode and the conductive film to be connected to each other.
11. A display device, which has a pixel region including a plurality of pixels, each of which has an organic layer held in between a lower electrode and an upper electrode on a substrate, said display device comprising:
a plurality of such lower electrodes respectively corresponding to each of the pixels provided on the substrate in the pixel region;
a first insulating film provided on the substrate, in which pixel openings allowing each of the lower electrodes to be exposed is provided;
a conductive film provided on the first insulating film outside the pixel region; and
a plurality of rectangular holes formed at substantially even intervals over the entire area of the conductive film and extending through the conductive film to expose the surface of the first insulating film are provided,
wherein,
the conductive film surrounds the pixel region in plan view and is connected to an upper electrode to create an auxiliary wiring.
12. The display device as set forth in claim 11 , further comprising:
an organic layer provided on the lower electrode; and
an upper electrode provided covering the organic layer, the first insulating film and the conductive film,
wherein,
the upper electrode and the conductive film are connected to each other.