Method and apparatus for measuring relative dielectric constant
View Patent ↗A relative-dielectric-constant measuring apparatus according to the present invention includes an ellipsometer and a capacitance measuring part. The ellipsometer allows non-contact measurements of the film thickness and optical constants of an insulation film formed on the upper surface of a wafer. The capacitance measuring part, on the other hand, allows non-contact measurements of the gap between the insulation film and an electrode and accumulation capacitance. The relative-dielectric-constant measuring apparatus can calculate the relative dielectric constant of the insulation film based on the measured film thickness, gap, and accumulation capacitance. Thus, the relative dielectric constant of the insulation film can be determined without contact and with high precision.
1. A relative-dielectric-constant measuring method for measuring a relative dielectric constant of an insulation film formed on a surface of a substrate, comprising the steps of:
(a) measuring a film thickness of said insulation film without contact;
(b) measuring a gap between said insulation film and an electrode spaced as opposed to said insulation film;
(c) measuring an accumulation capacitance between said substrate and said electrode; and
(d) calculating the relative dielectric constant of said insulation film by assigning values of said film thickness measured in said step (a), said gap measured in said step (b), and said accumulation capacitance measured in said step (c) to an equation indicating a relation of said accumulation capacitance between said substrate and said electrode with a resultant capacitance of an insulation capacitance of insulation film and a gap capacitance of air space.
2. The relative-dielectric-constant measuring method according to claim 1 , further comprising the step of:
(e) measuring optical constants of said insulation film without contact, wherein, in said step (b), said gap is measured based on said optical constants measured in said step (e).
3. The relative-dielectric-constant measuring method according to claim 2 , wherein in said step (e), said optical constants of said insulation film are measured by ellipsometry.
4. The relative-dielectric-constant measuring method according to claim 3 , wherein in said step (b), said gap is measured based on an amount of a laser beam that is completely reflected by an optical member to which said electrode is secured, and said ellipsometry in said step (e) uses a measuring light of the same wavelength as said laser beam.
5. The relative-dielectric-constant measuring method according to claim 4 , wherein in said step (a), said film thickness of said insulation film is measured by ellipsometry.
6. The relative-dielectric-constant measuring method according to claim 5 , further comprising the step of:
(f) adjusting said gap, wherein said steps (f), (b), and (c) are repeated a plurality of number of times to obtain a plurality of sets of measurement results of said gap and said accumulation capacitance, and in said step (d), said relative dielectric constant of said insulation film is calculated based on said plurality of sets of measurement results.
7. A relative-dielectric-constant measuring apparatus for measuring a relative dielectric constant of an insulation film formed on one surface of a substrate, comprising:
a film-thickness measuring part for measuring a film thickness of said insulation film without contact;
a capacitance measuring part for measuring a gap between said insulation film and a measuring electrode which is spaced as opposed to said insulation film and for measuring an accumulation capacitance between said substrate and said measuring electrode; and
an operation part for calculating said relative dielectric constant of said insulation film by assigning values of said film thickness measured by said film-thickness measuring part, and said gap and said accumulation capacitance both measured by said capacitance measuring part to an equation indicating a relation of said accumulation capacitance between said substrate and said electrode with a resultant capacitance of an insulation capacitance of insulation film and a gap capacitance of air space.
8. The relative-dielectric-constant measuring apparatus according to claim 7 , wherein said capacitance measuring part includes:
a contact electrode in contact with the other surface of said substrate;
said measuring electrode spaced as opposed to said insulation film on said substrate which is in contact with said contact electrode; an impedance meter for applying a bias voltage between said contact electrode and said measuring electrode, varying said bias voltage, and measuring a capacitance between said contact electrode and said measuring electrode.
9. The relative-dielectric-constant measuring apparatus according to claim 8 , further comprising: an optical-constant measuring part for determining optical constants of said insulation film.
10. The relative-dielectric-constant measuring apparatus according to claim 9 , wherein said optical-constant measuring part is an ellipsometer.
11. The relative-dielectric-constant measuring apparatus according to claim 10 , wherein said capacitance measuring part measures said gap based on an amount of a laser beam that is completely reflected by an optical member to which said measuring electrode is secured, and said ellipsometer uses a measuring light of the same wavelength as said laser beam.
12. The relative-dielectric-constant measuring apparatus according to claim 11 , wherein said film-thickness measuring part is an ellipsometer.
13. The relative-dielectric-constant measuring apparatus according to claim 12 , wherein said capacitance measuring part further includes a gap adjusting part for adjusting said gap between said insulation film and said measuring electrode.